JPS6424319A - Formation of superconductor thin film - Google Patents

Formation of superconductor thin film

Info

Publication number
JPS6424319A
JPS6424319A JP62181655A JP18165587A JPS6424319A JP S6424319 A JPS6424319 A JP S6424319A JP 62181655 A JP62181655 A JP 62181655A JP 18165587 A JP18165587 A JP 18165587A JP S6424319 A JPS6424319 A JP S6424319A
Authority
JP
Japan
Prior art keywords
thin film
superconductor thin
gas
formation
cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62181655A
Other languages
Japanese (ja)
Inventor
Hitoshi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP62181655A priority Critical patent/JPS6424319A/en
Publication of JPS6424319A publication Critical patent/JPS6424319A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To form a ceramic superconductor thin film with excellent quality by forming an oxide superconductor thin film by the CVD method. CONSTITUTION:An oxide superconductor thin film is formed by the CVD (chemical vapor phase deposition) method. A compound containing the component element of a superconductor is formed into gas, this gas (raw material gas) is fed to a deposition tank with the carrier gas, for example, and a thin film is deposited on the substrate in the deposition tank. The surface of an insulating layer constituting the weak junction section of a Josephson element is thereby damaged very rarely, and a junction face with little damage can be formed.
JP62181655A 1987-07-21 1987-07-21 Formation of superconductor thin film Pending JPS6424319A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62181655A JPS6424319A (en) 1987-07-21 1987-07-21 Formation of superconductor thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62181655A JPS6424319A (en) 1987-07-21 1987-07-21 Formation of superconductor thin film

Publications (1)

Publication Number Publication Date
JPS6424319A true JPS6424319A (en) 1989-01-26

Family

ID=16104545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62181655A Pending JPS6424319A (en) 1987-07-21 1987-07-21 Formation of superconductor thin film

Country Status (1)

Country Link
JP (1) JPS6424319A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990003453A1 (en) * 1988-09-28 1990-04-05 Oki Electric Industry Co., Ltd. Process for forming superconducting thin film
JPH04119923A (en) * 1990-09-10 1992-04-21 Kokusai Chodendo Sangyo Gijutsu Kenkyu Center Bi-sr-ca-cu-o superconducting ultrathin film and its production

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990003453A1 (en) * 1988-09-28 1990-04-05 Oki Electric Industry Co., Ltd. Process for forming superconducting thin film
EP0408753A1 (en) * 1988-09-28 1991-01-23 Oki Electric Industry Company, Limited Process for forming superconducting thin film
EP0408753B1 (en) * 1988-09-28 1993-06-16 Oki Electric Industry Company, Limited Process for forming superconducting thin film
JPH04119923A (en) * 1990-09-10 1992-04-21 Kokusai Chodendo Sangyo Gijutsu Kenkyu Center Bi-sr-ca-cu-o superconducting ultrathin film and its production

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