JPS642218A - Manufacture of thin film superconductor - Google Patents

Manufacture of thin film superconductor

Info

Publication number
JPS642218A
JPS642218A JP62156819A JP15681987A JPS642218A JP S642218 A JPS642218 A JP S642218A JP 62156819 A JP62156819 A JP 62156819A JP 15681987 A JP15681987 A JP 15681987A JP S642218 A JPS642218 A JP S642218A
Authority
JP
Japan
Prior art keywords
thin film
superconductor
substrate
deposited
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62156819A
Other languages
Japanese (ja)
Other versions
JPH012218A (en
Inventor
Hiroshi Ichikawa
Osamu Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62156819A priority Critical patent/JPS642218A/en
Publication of JPH012218A publication Critical patent/JPH012218A/en
Publication of JPS642218A publication Critical patent/JPS642218A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE: To improve superconductive characteristic and reproductivity of a thin film by depositing oxide superconductive thin film containing an A element, a B element and Cu while applying bias on a substrate surface.
CONSTITUTION: While introducing gas into a vacuum vessel 14, and oxide superconductive thin film containing at least an A element, a B element and Cu is deposited on a substrate 11. Namely the superconductor is made into a thin film and further its crystal property is controlled. Since the thinning of the film makes the raw material of the superconductor decomposed into ultra-fine particles of atomic state and deposited on the substrate 11, the composition of the superconductor formed is substantially uniform. Furthermore, applying bias on the substrate 11, the amount of oxygen in the film deposited can be freely controlled and the control of crystal property becomes easy. This makes it possible to obtain a superconductor of good reproductivity and stabilized high accuracy.
COPYRIGHT: (C)1989,JPO&Japio
JP62156819A 1987-06-24 1987-06-24 Manufacture of thin film superconductor Pending JPS642218A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156819A JPS642218A (en) 1987-06-24 1987-06-24 Manufacture of thin film superconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156819A JPS642218A (en) 1987-06-24 1987-06-24 Manufacture of thin film superconductor

Publications (2)

Publication Number Publication Date
JPH012218A JPH012218A (en) 1989-01-06
JPS642218A true JPS642218A (en) 1989-01-06

Family

ID=15636033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156819A Pending JPS642218A (en) 1987-06-24 1987-06-24 Manufacture of thin film superconductor

Country Status (1)

Country Link
JP (1) JPS642218A (en)

Similar Documents

Publication Publication Date Title
EP0328333A3 (en) Process for producing ceramic superconductors
JPS6414814A (en) Manufacture of oxide superconductive thin film
GB2106419A (en) Growth of structures based on group iv semiconductor materials
JPS5727079A (en) Manufacture of josephson element of oxide superconductor
JPS642218A (en) Manufacture of thin film superconductor
JPS54157779A (en) Production of silicon single crystal
EP0390139A3 (en) Ferroelectric thin film and method for producing the same
JPS6452329A (en) Superconductor
JPS6414977A (en) Superconducting device and manufacture thereof
JPS6452326A (en) Superconductor
JPS6452324A (en) Superconductor
JPS648682A (en) Manufacture of ceramic superconductor device
JPS6455880A (en) Manufacture of device having superconductive thin film
JPS6452322A (en) Superconductor
JPS6424319A (en) Formation of superconductor thin film
EP0334374A3 (en) Process of forming a superconductive wiring strip in low temperature ambient
JPS57126185A (en) Manufacture of josephson element
JPS6457685A (en) Formation of superconducting thin film
JPS6463215A (en) High temperature superconductive material
JPS6411380A (en) Manufacture of josephson element
JPS5617917A (en) Manufacture of silicon oxide film
JPS646322A (en) Thin film superconductor
JPS6483569A (en) High-temperature crucible and production thereof
Beyne et al. Process Conditions and Characterisation of High-T sub c Superconducting Thick Films
CA2065625A1 (en) Process for patterning layered thin films including a superconductor layer