JPS6463292A - Manufacture of electroluminescence element - Google Patents
Manufacture of electroluminescence elementInfo
- Publication number
- JPS6463292A JPS6463292A JP62219439A JP21943987A JPS6463292A JP S6463292 A JPS6463292 A JP S6463292A JP 62219439 A JP62219439 A JP 62219439A JP 21943987 A JP21943987 A JP 21943987A JP S6463292 A JPS6463292 A JP S6463292A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ceramic
- insulation layer
- ceramic substrate
- luminescent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
PURPOSE:To enable the entire undulated surface of a ceramic substrate to have a mirror surface and obtain uniform luminescent characteristics at any part of the surface by forming the surface of an insulation layer as a membrane layer to have a mirror or nearly mirror surface using a sputter etching method and then making the membrane layer. CONSTITUTION:A ceramic substrate 4 is obtained by sintering monolithically a ceramic base 1, an internal electrode 2 and a ceramic insulation layer 3. With the ceramic insulation layer 3 up, the ceramic substrate 4 is placed on an insulation board 10 and an Ar gas is used as an etching gas A for 30 minutes of sputter etching with 40W high frequency power and 2X10<-2>Torr pressure. The entire surface of the ceramic substrate 4 is made to have a mirror surface regardless of the undulation thereof. Then, a transparent electrode 9 comprising an intermediate layer 6, a luminescent layer 7, an insulation layer 8 and ITO is formed in turn for preventing the diffusion of detrimental metal ion from the ceramic insulation layer 3 to the luminescent layer 7 and improving the brightness characteristics of an element. The material of the electrode 9 is TaSiO as in the intermediate layer 6 and the film formation method therefor is the same as for the intermediate layer 6.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62219439A JPS6463292A (en) | 1987-09-01 | 1987-09-01 | Manufacture of electroluminescence element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62219439A JPS6463292A (en) | 1987-09-01 | 1987-09-01 | Manufacture of electroluminescence element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6463292A true JPS6463292A (en) | 1989-03-09 |
Family
ID=16735424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62219439A Pending JPS6463292A (en) | 1987-09-01 | 1987-09-01 | Manufacture of electroluminescence element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6463292A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5888410A (en) * | 1996-04-01 | 1999-03-30 | Denso Corporation | Dry etching method and manufacturing method of manufacturing EL element using same |
-
1987
- 1987-09-01 JP JP62219439A patent/JPS6463292A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5888410A (en) * | 1996-04-01 | 1999-03-30 | Denso Corporation | Dry etching method and manufacturing method of manufacturing EL element using same |
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