JPS64739A - Thermal oxidizing device for semiconductor substrate - Google Patents
Thermal oxidizing device for semiconductor substrateInfo
- Publication number
- JPS64739A JPS64739A JP15569487A JP15569487A JPS64739A JP S64739 A JPS64739 A JP S64739A JP 15569487 A JP15569487 A JP 15569487A JP 15569487 A JP15569487 A JP 15569487A JP S64739 A JPS64739 A JP S64739A
- Authority
- JP
- Japan
- Prior art keywords
- horizontal surface
- core tube
- semiconductor substrate
- oxidation
- angles except
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable thermal oxidation only by using space having the excellent uniformity of a temperature and reaction-gas partial pressure by forming slits having angles except 90° to a horizontal surface to a boat and fixing a semiconductor substrate at angles except 90° to the horizontal surface.
CONSTITUTION: Semiconductor substrates 104 are fastened at angles except perpendicularity to a horizontal surface by inserting the substrates into obliquely shaped slits, and oxide films are formed onto the surfaces through the same method as conventional one. Height in the vertical direction in a core tube is shortened, oxidation is not performed in upper and lower sections in the core tube and oxidation can be executed only by employing space at a central section by askew fixing the semiconductor substrates 104 to the horizontal surface and the core tube 102.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15569487A JPS64739A (en) | 1987-06-23 | 1987-06-23 | Thermal oxidizing device for semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15569487A JPS64739A (en) | 1987-06-23 | 1987-06-23 | Thermal oxidizing device for semiconductor substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01739A JPH01739A (en) | 1989-01-05 |
JPS64739A true JPS64739A (en) | 1989-01-05 |
Family
ID=15611495
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15569487A Pending JPS64739A (en) | 1987-06-23 | 1987-06-23 | Thermal oxidizing device for semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS64739A (en) |
-
1987
- 1987-06-23 JP JP15569487A patent/JPS64739A/en active Pending
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