JPS6461733A - Manufacture of matrix type display device - Google Patents

Manufacture of matrix type display device

Info

Publication number
JPS6461733A
JPS6461733A JP62218411A JP21841187A JPS6461733A JP S6461733 A JPS6461733 A JP S6461733A JP 62218411 A JP62218411 A JP 62218411A JP 21841187 A JP21841187 A JP 21841187A JP S6461733 A JPS6461733 A JP S6461733A
Authority
JP
Japan
Prior art keywords
gate line
repeat
display device
matrix type
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62218411A
Other languages
Japanese (ja)
Other versions
JP2688816B2 (en
Inventor
Tatsuya Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62218411A priority Critical patent/JP2688816B2/en
Publication of JPS6461733A publication Critical patent/JPS6461733A/en
Application granted granted Critical
Publication of JP2688816B2 publication Critical patent/JP2688816B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Thin Film Transistor (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To obtain the high-performance display device by forming a matrix type array pattern of optional size by employing a step-and-repeat exposing method. CONSTITUTION:When a gate line is formed, a gate line material 1 is filmed over the entire surface of a substrate 8, and a pattern forming material 14 is applied thereupon. Then a step-and-repeat mask 15 for gate line formation is fixed and the substrate is moved stepwise or moved for exposure. Then development is carried out to form a resist pattern. Then unnecessary Cr, etc., is etched away to separate the photoresist 14, thereby forming the gate line 1 in a desired shape. Similarly, a TFT part, a source line, a drain electrode, a display electrode, etc., formed of a gate insulating film, silicon, etc., are formed by using each step-and-repeat exposure mask for shape formation.
JP62218411A 1987-09-01 1987-09-01 Matrix-type display device manufacturing method Expired - Lifetime JP2688816B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62218411A JP2688816B2 (en) 1987-09-01 1987-09-01 Matrix-type display device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62218411A JP2688816B2 (en) 1987-09-01 1987-09-01 Matrix-type display device manufacturing method

Publications (2)

Publication Number Publication Date
JPS6461733A true JPS6461733A (en) 1989-03-08
JP2688816B2 JP2688816B2 (en) 1997-12-10

Family

ID=16719492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62218411A Expired - Lifetime JP2688816B2 (en) 1987-09-01 1987-09-01 Matrix-type display device manufacturing method

Country Status (1)

Country Link
JP (1) JP2688816B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04319916A (en) * 1991-04-19 1992-11-10 Sharp Corp Manufacture of liquid crystal display panel
KR20220000816A (en) 2020-06-26 2022-01-04 가부시키가이샤 에바라 세이사꾸쇼 Resin mold rotor, canned motor, canned motor pump, fan scrubber and vacuum pump device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054434A (en) * 1983-09-06 1985-03-28 Toshiba Corp Exposure device
JPS62102523A (en) * 1985-10-29 1987-05-13 Canon Inc Exposing method
JPS62104440U (en) * 1985-09-06 1987-07-03

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054434A (en) * 1983-09-06 1985-03-28 Toshiba Corp Exposure device
JPS62104440U (en) * 1985-09-06 1987-07-03
JPS62102523A (en) * 1985-10-29 1987-05-13 Canon Inc Exposing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04319916A (en) * 1991-04-19 1992-11-10 Sharp Corp Manufacture of liquid crystal display panel
KR20220000816A (en) 2020-06-26 2022-01-04 가부시키가이샤 에바라 세이사꾸쇼 Resin mold rotor, canned motor, canned motor pump, fan scrubber and vacuum pump device

Also Published As

Publication number Publication date
JP2688816B2 (en) 1997-12-10

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