JPS645477B2 - - Google Patents
Info
- Publication number
- JPS645477B2 JPS645477B2 JP3864480A JP3864480A JPS645477B2 JP S645477 B2 JPS645477 B2 JP S645477B2 JP 3864480 A JP3864480 A JP 3864480A JP 3864480 A JP3864480 A JP 3864480A JP S645477 B2 JPS645477 B2 JP S645477B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- interlayer insulating
- glass
- hole
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011229 interlayer Substances 0.000 claims description 18
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 9
- 239000002253 acid Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 11
- 239000010410 layer Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000006089 photosensitive glass Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 239000006018 Li-aluminosilicate Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3864480A JPS56134800A (en) | 1980-03-26 | 1980-03-26 | Method of forming multilayer wire interlayer insulating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3864480A JPS56134800A (en) | 1980-03-26 | 1980-03-26 | Method of forming multilayer wire interlayer insulating film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56134800A JPS56134800A (en) | 1981-10-21 |
| JPS645477B2 true JPS645477B2 (enExample) | 1989-01-30 |
Family
ID=12530949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3864480A Granted JPS56134800A (en) | 1980-03-26 | 1980-03-26 | Method of forming multilayer wire interlayer insulating film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56134800A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63128699A (ja) * | 1986-11-19 | 1988-06-01 | 株式会社日立製作所 | 感光性ガラス−セラミツク多層配線基板 |
-
1980
- 1980-03-26 JP JP3864480A patent/JPS56134800A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56134800A (en) | 1981-10-21 |
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