JPS56134800A - Method of forming multilayer wire interlayer insulating film - Google Patents

Method of forming multilayer wire interlayer insulating film

Info

Publication number
JPS56134800A
JPS56134800A JP3864480A JP3864480A JPS56134800A JP S56134800 A JPS56134800 A JP S56134800A JP 3864480 A JP3864480 A JP 3864480A JP 3864480 A JP3864480 A JP 3864480A JP S56134800 A JPS56134800 A JP S56134800A
Authority
JP
Japan
Prior art keywords
insulating film
interlayer insulating
forming multilayer
multilayer wire
wire interlayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3864480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS645477B2 (enExample
Inventor
Tamio Saitou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP3864480A priority Critical patent/JPS56134800A/ja
Publication of JPS56134800A publication Critical patent/JPS56134800A/ja
Publication of JPS645477B2 publication Critical patent/JPS645477B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
JP3864480A 1980-03-26 1980-03-26 Method of forming multilayer wire interlayer insulating film Granted JPS56134800A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3864480A JPS56134800A (en) 1980-03-26 1980-03-26 Method of forming multilayer wire interlayer insulating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3864480A JPS56134800A (en) 1980-03-26 1980-03-26 Method of forming multilayer wire interlayer insulating film

Publications (2)

Publication Number Publication Date
JPS56134800A true JPS56134800A (en) 1981-10-21
JPS645477B2 JPS645477B2 (enExample) 1989-01-30

Family

ID=12530949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3864480A Granted JPS56134800A (en) 1980-03-26 1980-03-26 Method of forming multilayer wire interlayer insulating film

Country Status (1)

Country Link
JP (1) JPS56134800A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128699A (ja) * 1986-11-19 1988-06-01 株式会社日立製作所 感光性ガラス−セラミツク多層配線基板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128699A (ja) * 1986-11-19 1988-06-01 株式会社日立製作所 感光性ガラス−セラミツク多層配線基板

Also Published As

Publication number Publication date
JPS645477B2 (enExample) 1989-01-30

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