JPS6453415A - Diffusion of impurity - Google Patents

Diffusion of impurity

Info

Publication number
JPS6453415A
JPS6453415A JP20981987A JP20981987A JPS6453415A JP S6453415 A JPS6453415 A JP S6453415A JP 20981987 A JP20981987 A JP 20981987A JP 20981987 A JP20981987 A JP 20981987A JP S6453415 A JPS6453415 A JP S6453415A
Authority
JP
Japan
Prior art keywords
layer
diffusion source
source layer
impurity
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20981987A
Other languages
English (en)
Inventor
Takao Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP20981987A priority Critical patent/JPS6453415A/ja
Publication of JPS6453415A publication Critical patent/JPS6453415A/ja
Pending legal-status Critical Current

Links

JP20981987A 1987-08-24 1987-08-24 Diffusion of impurity Pending JPS6453415A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20981987A JPS6453415A (en) 1987-08-24 1987-08-24 Diffusion of impurity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20981987A JPS6453415A (en) 1987-08-24 1987-08-24 Diffusion of impurity

Publications (1)

Publication Number Publication Date
JPS6453415A true JPS6453415A (en) 1989-03-01

Family

ID=16579139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20981987A Pending JPS6453415A (en) 1987-08-24 1987-08-24 Diffusion of impurity

Country Status (1)

Country Link
JP (1) JPS6453415A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0517550U (ja) * 1991-08-21 1993-03-05 日機装株式会社 連続バツチ式全鉄分析計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0517550U (ja) * 1991-08-21 1993-03-05 日機装株式会社 連続バツチ式全鉄分析計

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