JPS5796547A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5796547A JPS5796547A JP17290780A JP17290780A JPS5796547A JP S5796547 A JPS5796547 A JP S5796547A JP 17290780 A JP17290780 A JP 17290780A JP 17290780 A JP17290780 A JP 17290780A JP S5796547 A JPS5796547 A JP S5796547A
- Authority
- JP
- Japan
- Prior art keywords
- aperture
- oxide film
- thermal processing
- step angle
- photoresist layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To form an aperture which has an arbitrary step angle by a method wherein an Si oxide film is irradiated selectively by plasma and after thermal processing the Si oxide is partially removed. CONSTITUTION:A photoresist layer which has a specified aperture is formed on an Si oxide film 2 formed on a P type Si substrate 1. The Si oxide film is irradiated by CF4 gas plasma for 5min using the photoresist layer as a mask and, after thermal processing in N2 at 200-500 deg.C for 30min, is etched by NH4F solution, so that an aperture with a step angle theta is formed. With the above method a very stable step angle can be obtained and, according to conditions such as of thermal processing, a required angle can be specified.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17290780A JPS5796547A (en) | 1980-12-08 | 1980-12-08 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17290780A JPS5796547A (en) | 1980-12-08 | 1980-12-08 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5796547A true JPS5796547A (en) | 1982-06-15 |
Family
ID=15950547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17290780A Pending JPS5796547A (en) | 1980-12-08 | 1980-12-08 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5796547A (en) |
-
1980
- 1980-12-08 JP JP17290780A patent/JPS5796547A/en active Pending
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