JPS6451698A - Manufacture of superconducting thin film multilayer board - Google Patents
Manufacture of superconducting thin film multilayer boardInfo
- Publication number
- JPS6451698A JPS6451698A JP62208107A JP20810787A JPS6451698A JP S6451698 A JPS6451698 A JP S6451698A JP 62208107 A JP62208107 A JP 62208107A JP 20810787 A JP20810787 A JP 20810787A JP S6451698 A JPS6451698 A JP S6451698A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- insulating layer
- thin film
- insulating
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Superconductors And Manufacturing Methods Therefor (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62208107A JPS6451698A (en) | 1987-08-24 | 1987-08-24 | Manufacture of superconducting thin film multilayer board |
US07/228,297 US4913769A (en) | 1987-08-24 | 1988-08-04 | Process for preparing superconductive wiring board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62208107A JPS6451698A (en) | 1987-08-24 | 1987-08-24 | Manufacture of superconducting thin film multilayer board |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6451698A true JPS6451698A (en) | 1989-02-27 |
Family
ID=16550751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62208107A Pending JPS6451698A (en) | 1987-08-24 | 1987-08-24 | Manufacture of superconducting thin film multilayer board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6451698A (ja) |
-
1987
- 1987-08-24 JP JP62208107A patent/JPS6451698A/ja active Pending
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