JPS6449243A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS6449243A
JPS6449243A JP20518587A JP20518587A JPS6449243A JP S6449243 A JPS6449243 A JP S6449243A JP 20518587 A JP20518587 A JP 20518587A JP 20518587 A JP20518587 A JP 20518587A JP S6449243 A JPS6449243 A JP S6449243A
Authority
JP
Japan
Prior art keywords
wiring
gold
titanium
film
nitride film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20518587A
Other languages
Japanese (ja)
Inventor
Osamu Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP20518587A priority Critical patent/JPS6449243A/en
Publication of JPS6449243A publication Critical patent/JPS6449243A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE:To realize the high quality, high reliability and high performance of a wiring provided on a semiconductor substrate by composing the wiring of a three-layer structure of a titanium film, a titanium nitride film and a gold wiring built up in this order from the bottom to the top. CONSTITUTION:A wiring provided on a semiconductor substrate is composed of a three-layer structure of a titanium film 15, a titanium nitride film 16 and a gold wiring 17 built up in this order from the bottom to the top and patterned into a required plane pattern. The titanium nitride film 16 is provided to improve the adhesiveness between the titanium film 15 and the gold wiring 17. As the main part of the wiring is formed with the gold wiring 17, the wiring has excellent electrical characteristics. Moreover, as the titanium film 15 and the titanium nitride film 16 serve as a perfect barrier, the reaction between gold and silicon can be suppressed. With this constitution, the high quality, high reliability and high performance of the wiring can be realized.
JP20518587A 1987-08-20 1987-08-20 Semiconductor integrated circuit device Pending JPS6449243A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20518587A JPS6449243A (en) 1987-08-20 1987-08-20 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20518587A JPS6449243A (en) 1987-08-20 1987-08-20 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS6449243A true JPS6449243A (en) 1989-02-23

Family

ID=16502818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20518587A Pending JPS6449243A (en) 1987-08-20 1987-08-20 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS6449243A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211269A (en) * 1981-06-22 1982-12-25 Mitsubishi Electric Corp Semiconductor element
JPS59210656A (en) * 1983-05-16 1984-11-29 Fujitsu Ltd Semiconductor device
JPS6232610A (en) * 1985-08-05 1987-02-12 Fujitsu Ltd Manufacture of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211269A (en) * 1981-06-22 1982-12-25 Mitsubishi Electric Corp Semiconductor element
JPS59210656A (en) * 1983-05-16 1984-11-29 Fujitsu Ltd Semiconductor device
JPS6232610A (en) * 1985-08-05 1987-02-12 Fujitsu Ltd Manufacture of semiconductor device

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