JPS6449243A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS6449243A JPS6449243A JP20518587A JP20518587A JPS6449243A JP S6449243 A JPS6449243 A JP S6449243A JP 20518587 A JP20518587 A JP 20518587A JP 20518587 A JP20518587 A JP 20518587A JP S6449243 A JPS6449243 A JP S6449243A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- gold
- titanium
- film
- nitride film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To realize the high quality, high reliability and high performance of a wiring provided on a semiconductor substrate by composing the wiring of a three-layer structure of a titanium film, a titanium nitride film and a gold wiring built up in this order from the bottom to the top. CONSTITUTION:A wiring provided on a semiconductor substrate is composed of a three-layer structure of a titanium film 15, a titanium nitride film 16 and a gold wiring 17 built up in this order from the bottom to the top and patterned into a required plane pattern. The titanium nitride film 16 is provided to improve the adhesiveness between the titanium film 15 and the gold wiring 17. As the main part of the wiring is formed with the gold wiring 17, the wiring has excellent electrical characteristics. Moreover, as the titanium film 15 and the titanium nitride film 16 serve as a perfect barrier, the reaction between gold and silicon can be suppressed. With this constitution, the high quality, high reliability and high performance of the wiring can be realized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20518587A JPS6449243A (en) | 1987-08-20 | 1987-08-20 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20518587A JPS6449243A (en) | 1987-08-20 | 1987-08-20 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6449243A true JPS6449243A (en) | 1989-02-23 |
Family
ID=16502818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20518587A Pending JPS6449243A (en) | 1987-08-20 | 1987-08-20 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6449243A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57211269A (en) * | 1981-06-22 | 1982-12-25 | Mitsubishi Electric Corp | Semiconductor element |
JPS59210656A (en) * | 1983-05-16 | 1984-11-29 | Fujitsu Ltd | Semiconductor device |
JPS6232610A (en) * | 1985-08-05 | 1987-02-12 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1987
- 1987-08-20 JP JP20518587A patent/JPS6449243A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57211269A (en) * | 1981-06-22 | 1982-12-25 | Mitsubishi Electric Corp | Semiconductor element |
JPS59210656A (en) * | 1983-05-16 | 1984-11-29 | Fujitsu Ltd | Semiconductor device |
JPS6232610A (en) * | 1985-08-05 | 1987-02-12 | Fujitsu Ltd | Manufacture of semiconductor device |
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