JPS6450485A - Integrated circuit - Google Patents
Integrated circuitInfo
- Publication number
- JPS6450485A JPS6450485A JP62206301A JP20630187A JPS6450485A JP S6450485 A JPS6450485 A JP S6450485A JP 62206301 A JP62206301 A JP 62206301A JP 20630187 A JP20630187 A JP 20630187A JP S6450485 A JPS6450485 A JP S6450485A
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- integrated circuit
- superconductor
- circuit operation
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002887 superconductor Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000011810 insulating material Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- -1 etc. Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To stabilize a circuit operation by providing wirings which employ a superconductor on an integrated circuit through a laminar material formed to include an oxide of specific element. CONSTITUTION:An oxide layer 3 made of Mg, Zr, Al, etc., is provided on a substrate 1 made of Si, Ge or compound semiconductor, such as GaAs, InP, etc., or an insulating material 2 made of SiO2, SiO, Si3N4, etc., and a wiring layer 4 made of oxide superconductor is provided thereon. These oxides prevent element, such as Cu, Y, Ba, Sr, Ca, etc., for forming the oxide superconductor from diffusing or reacting with a semiconductor material or an insulating mate rial. Thus, a circuit operation can be stabilized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206301A JPS6450485A (en) | 1987-08-21 | 1987-08-21 | Integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206301A JPS6450485A (en) | 1987-08-21 | 1987-08-21 | Integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6450485A true JPS6450485A (en) | 1989-02-27 |
Family
ID=16521036
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62206301A Pending JPS6450485A (en) | 1987-08-21 | 1987-08-21 | Integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6450485A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01149309A (en) * | 1987-12-04 | 1989-06-12 | Fujikura Ltd | Superconductive electric circuit |
EP0444893A2 (en) * | 1990-02-28 | 1991-09-04 | Westinghouse Electric Corporation | Method of making ohmic contacts between semiconductors and oxide superconductors |
US5325692A (en) * | 1992-09-28 | 1994-07-05 | Sumitomo Light Metal Industries, Ltd. | Method of controlling transverse shape of rolled strip, based on tension distribution |
-
1987
- 1987-08-21 JP JP62206301A patent/JPS6450485A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01149309A (en) * | 1987-12-04 | 1989-06-12 | Fujikura Ltd | Superconductive electric circuit |
EP0444893A2 (en) * | 1990-02-28 | 1991-09-04 | Westinghouse Electric Corporation | Method of making ohmic contacts between semiconductors and oxide superconductors |
US5325692A (en) * | 1992-09-28 | 1994-07-05 | Sumitomo Light Metal Industries, Ltd. | Method of controlling transverse shape of rolled strip, based on tension distribution |
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