JPS6442857A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS6442857A JPS6442857A JP20027087A JP20027087A JPS6442857A JP S6442857 A JPS6442857 A JP S6442857A JP 20027087 A JP20027087 A JP 20027087A JP 20027087 A JP20027087 A JP 20027087A JP S6442857 A JPS6442857 A JP S6442857A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- solid
- thereabouts
- concentration
- contained
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20027087A JPS6442857A (en) | 1987-08-11 | 1987-08-11 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20027087A JPS6442857A (en) | 1987-08-11 | 1987-08-11 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6442857A true JPS6442857A (en) | 1989-02-15 |
Family
ID=16421535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20027087A Pending JPS6442857A (en) | 1987-08-11 | 1987-08-11 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6442857A (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02271633A (ja) * | 1989-04-13 | 1990-11-06 | Hitachi Ltd | 半導体装置の配線層 |
JPH03182358A (ja) * | 1989-12-11 | 1991-08-08 | Canon Inc | 記録ヘッド及び記録ヘッド用素子基板 |
JPH03250627A (ja) * | 1990-01-31 | 1991-11-08 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JPH04323871A (ja) * | 1991-04-23 | 1992-11-13 | Kobe Steel Ltd | 耐熱性に優れた液晶ディスプレイ用配線電極薄膜材料 |
US5696975A (en) * | 1994-09-02 | 1997-12-09 | Compaq Computer Corporation | Launching computer applications |
WO2000000661A1 (fr) * | 1998-06-29 | 2000-01-06 | Kabushiki Kaisha Toshiba | Cible de vaporisation |
WO2000044047A1 (en) * | 1999-01-20 | 2000-07-27 | Infineon Technologies Ag | Microelectronic structure |
US6206985B1 (en) | 1991-03-07 | 2001-03-27 | Kabushiki Kaisha Kobe Seiko Sho | A1 alloy films and melting A1 alloy sputtering targets for depositing A1 alloy films |
US6882017B2 (en) | 1998-08-21 | 2005-04-19 | Micron Technology, Inc. | Field effect transistors and integrated circuitry |
-
1987
- 1987-08-11 JP JP20027087A patent/JPS6442857A/ja active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02271633A (ja) * | 1989-04-13 | 1990-11-06 | Hitachi Ltd | 半導体装置の配線層 |
JPH03182358A (ja) * | 1989-12-11 | 1991-08-08 | Canon Inc | 記録ヘッド及び記録ヘッド用素子基板 |
JPH03250627A (ja) * | 1990-01-31 | 1991-11-08 | Fujitsu Ltd | 半導体装置及びその製造方法 |
US6206985B1 (en) | 1991-03-07 | 2001-03-27 | Kabushiki Kaisha Kobe Seiko Sho | A1 alloy films and melting A1 alloy sputtering targets for depositing A1 alloy films |
JPH04323871A (ja) * | 1991-04-23 | 1992-11-13 | Kobe Steel Ltd | 耐熱性に優れた液晶ディスプレイ用配線電極薄膜材料 |
US5696975A (en) * | 1994-09-02 | 1997-12-09 | Compaq Computer Corporation | Launching computer applications |
WO2000000661A1 (fr) * | 1998-06-29 | 2000-01-06 | Kabushiki Kaisha Toshiba | Cible de vaporisation |
US9437486B2 (en) | 1998-06-29 | 2016-09-06 | Kabushiki Kaisha Toshiba | Sputtering target |
US6882017B2 (en) | 1998-08-21 | 2005-04-19 | Micron Technology, Inc. | Field effect transistors and integrated circuitry |
US6939799B2 (en) | 1998-08-21 | 2005-09-06 | Micron Technology, Inc. | Method of forming a field effect transistor and methods of forming integrated circuitry |
WO2000044047A1 (en) * | 1999-01-20 | 2000-07-27 | Infineon Technologies Ag | Microelectronic structure |
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