JPS6443922A - Formation of superconductive thin film - Google Patents

Formation of superconductive thin film

Info

Publication number
JPS6443922A
JPS6443922A JP62199821A JP19982187A JPS6443922A JP S6443922 A JPS6443922 A JP S6443922A JP 62199821 A JP62199821 A JP 62199821A JP 19982187 A JP19982187 A JP 19982187A JP S6443922 A JPS6443922 A JP S6443922A
Authority
JP
Japan
Prior art keywords
thin film
superconductive
substrate
region
formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62199821A
Other languages
Japanese (ja)
Inventor
Takashi Akioka
Tokuo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62199821A priority Critical patent/JPS6443922A/en
Publication of JPS6443922A publication Critical patent/JPS6443922A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Abstract

PURPOSE:To make it possible to form a thin film with separated to superconductive and non-superconductive regions without damage by selectively reducing an oxide superconductive thin film formed on a substrate, and conducting only heat treatment. CONSTITUTION:Yb, Ba, Cu, and O film 1 is made to be accumulated on a substrate 2 by electron beam evaporation. Then a substance 3 having a high reduction property such as Cu etc., is deposited and patterned by. BY applying heat treatment to the substance 3, the lower part of Cu becomes a non- superconductive region 4 because O2 couples with Cu to escape from a thin film, and a part not contacted to Cu becomes a superconductive region 5. When finally Cu is removed, a suitable wiring layer for semiconductor element can be obtained. This makes it possible to form the thin film having the non- superconductive region and the superconductive region without process giving damage to a substrate or the thin film of etc.
JP62199821A 1987-08-12 1987-08-12 Formation of superconductive thin film Pending JPS6443922A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62199821A JPS6443922A (en) 1987-08-12 1987-08-12 Formation of superconductive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62199821A JPS6443922A (en) 1987-08-12 1987-08-12 Formation of superconductive thin film

Publications (1)

Publication Number Publication Date
JPS6443922A true JPS6443922A (en) 1989-02-16

Family

ID=16414204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62199821A Pending JPS6443922A (en) 1987-08-12 1987-08-12 Formation of superconductive thin film

Country Status (1)

Country Link
JP (1) JPS6443922A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02252680A (en) * 1989-03-24 1990-10-11 Nippon Cement Co Ltd Patterning of oxide superconducting film
JPH08162682A (en) * 1994-12-08 1996-06-21 Hitachi Ltd Superconducting element and manufacture thereof
JP2012199500A (en) * 2011-03-08 2012-10-18 Tottori Univ Josephson element and manufacturing method therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02252680A (en) * 1989-03-24 1990-10-11 Nippon Cement Co Ltd Patterning of oxide superconducting film
JPH08162682A (en) * 1994-12-08 1996-06-21 Hitachi Ltd Superconducting element and manufacture thereof
JP2012199500A (en) * 2011-03-08 2012-10-18 Tottori Univ Josephson element and manufacturing method therefor

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