JPS642439Y2 - - Google Patents

Info

Publication number
JPS642439Y2
JPS642439Y2 JP1981183048U JP18304881U JPS642439Y2 JP S642439 Y2 JPS642439 Y2 JP S642439Y2 JP 1981183048 U JP1981183048 U JP 1981183048U JP 18304881 U JP18304881 U JP 18304881U JP S642439 Y2 JPS642439 Y2 JP S642439Y2
Authority
JP
Japan
Prior art keywords
jig
etching
etched
silicon wafer
etching liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981183048U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5887336U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18304881U priority Critical patent/JPS5887336U/ja
Publication of JPS5887336U publication Critical patent/JPS5887336U/ja
Application granted granted Critical
Publication of JPS642439Y2 publication Critical patent/JPS642439Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP18304881U 1981-12-09 1981-12-09 蝕刻装置 Granted JPS5887336U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18304881U JPS5887336U (ja) 1981-12-09 1981-12-09 蝕刻装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18304881U JPS5887336U (ja) 1981-12-09 1981-12-09 蝕刻装置

Publications (2)

Publication Number Publication Date
JPS5887336U JPS5887336U (ja) 1983-06-14
JPS642439Y2 true JPS642439Y2 (enrdf_load_stackoverflow) 1989-01-20

Family

ID=29981963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18304881U Granted JPS5887336U (ja) 1981-12-09 1981-12-09 蝕刻装置

Country Status (1)

Country Link
JP (1) JPS5887336U (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970336U (ja) * 1982-10-30 1984-05-12 日本電信電話株式会社 エツチング装置
JPH0616508B2 (ja) * 1987-09-25 1994-03-02 株式会社東芝 半導体装置の製造方法及びその装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5824939B2 (ja) * 1975-08-27 1983-05-24 株式会社日立製作所 センタクエツチングホウホウ
JPS5722432Y2 (enrdf_load_stackoverflow) * 1976-06-28 1982-05-15
JPS54152661U (enrdf_load_stackoverflow) * 1978-04-14 1979-10-24

Also Published As

Publication number Publication date
JPS5887336U (ja) 1983-06-14

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