JPS5887336U - 蝕刻装置 - Google Patents

蝕刻装置

Info

Publication number
JPS5887336U
JPS5887336U JP18304881U JP18304881U JPS5887336U JP S5887336 U JPS5887336 U JP S5887336U JP 18304881 U JP18304881 U JP 18304881U JP 18304881 U JP18304881 U JP 18304881U JP S5887336 U JPS5887336 U JP S5887336U
Authority
JP
Japan
Prior art keywords
jig
etching device
etching
etched
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18304881U
Other languages
English (en)
Japanese (ja)
Other versions
JPS642439Y2 (enrdf_load_stackoverflow
Inventor
克美 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP18304881U priority Critical patent/JPS5887336U/ja
Publication of JPS5887336U publication Critical patent/JPS5887336U/ja
Application granted granted Critical
Publication of JPS642439Y2 publication Critical patent/JPS642439Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP18304881U 1981-12-09 1981-12-09 蝕刻装置 Granted JPS5887336U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18304881U JPS5887336U (ja) 1981-12-09 1981-12-09 蝕刻装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18304881U JPS5887336U (ja) 1981-12-09 1981-12-09 蝕刻装置

Publications (2)

Publication Number Publication Date
JPS5887336U true JPS5887336U (ja) 1983-06-14
JPS642439Y2 JPS642439Y2 (enrdf_load_stackoverflow) 1989-01-20

Family

ID=29981963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18304881U Granted JPS5887336U (ja) 1981-12-09 1981-12-09 蝕刻装置

Country Status (1)

Country Link
JP (1) JPS5887336U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970336U (ja) * 1982-10-30 1984-05-12 日本電信電話株式会社 エツチング装置
JPS6482654A (en) * 1987-09-25 1989-03-28 Toshiba Corp Manufacture of semiconductor device and equipment therefor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227368A (en) * 1975-08-27 1977-03-01 Hitachi Ltd Selection etching method
JPS533922U (enrdf_load_stackoverflow) * 1976-06-28 1978-01-14
JPS54152661U (enrdf_load_stackoverflow) * 1978-04-14 1979-10-24

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227368A (en) * 1975-08-27 1977-03-01 Hitachi Ltd Selection etching method
JPS533922U (enrdf_load_stackoverflow) * 1976-06-28 1978-01-14
JPS54152661U (enrdf_load_stackoverflow) * 1978-04-14 1979-10-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970336U (ja) * 1982-10-30 1984-05-12 日本電信電話株式会社 エツチング装置
JPS6482654A (en) * 1987-09-25 1989-03-28 Toshiba Corp Manufacture of semiconductor device and equipment therefor

Also Published As

Publication number Publication date
JPS642439Y2 (enrdf_load_stackoverflow) 1989-01-20

Similar Documents

Publication Publication Date Title
JPS5887336U (ja) 蝕刻装置
JPS58128441U (ja) 現像装置
JPS60190036U (ja) ウエツトエツチング装置
JPS5936411U (ja) 空調装置
JPS5858884U (ja) 筒状部材の洗浄装置
JPS59117950U (ja) エンジン実験用冷却装置
JPS6017236U (ja) 定圧液体供給装置
JPS5934329U (ja) 水位計用測水筒
JPS5836738U (ja) 露光用マスク装置
JPS58120287U (ja) 便器
JPS5825681U (ja) 圧力タンク
JPS6137290U (ja) スカム除去装置付上澄液排出装置
JPS59146005U (ja) 液分離装置
JPS5916936U (ja) 風呂釜装置
JPS6089271U (ja) 処理槽
JPS59152339U (ja) 浴槽水早沸き水容器具
JPS5986260U (ja) サイクロン集塵装置における泥状粉塵排出装置
JPS58195831U (ja) 水道用メ−タ−
JPS5895048U (ja) ウエ−ハ試験用試料台
JPS58171092U (ja) 浴槽
JPS60112251U (ja) 現像装置
JPS6123326U (ja) 河川の表面取水装置
JPS5998320U (ja) 沈殿槽水深計測装置
JPS6111979U (ja) レジスト塗布装置
JPS5992780U (ja) 浴槽の給水装置