JPS6418264A - Metal insulator semiconductor transistor and manufacture thereof - Google Patents

Metal insulator semiconductor transistor and manufacture thereof

Info

Publication number
JPS6418264A
JPS6418264A JP17443587A JP17443587A JPS6418264A JP S6418264 A JPS6418264 A JP S6418264A JP 17443587 A JP17443587 A JP 17443587A JP 17443587 A JP17443587 A JP 17443587A JP S6418264 A JPS6418264 A JP S6418264A
Authority
JP
Japan
Prior art keywords
insulating film
gate
source
drain
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17443587A
Other languages
English (en)
Inventor
Masao Fukuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP17443587A priority Critical patent/JPS6418264A/ja
Publication of JPS6418264A publication Critical patent/JPS6418264A/ja
Pending legal-status Critical Current

Links

JP17443587A 1987-07-13 1987-07-13 Metal insulator semiconductor transistor and manufacture thereof Pending JPS6418264A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17443587A JPS6418264A (en) 1987-07-13 1987-07-13 Metal insulator semiconductor transistor and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17443587A JPS6418264A (en) 1987-07-13 1987-07-13 Metal insulator semiconductor transistor and manufacture thereof

Publications (1)

Publication Number Publication Date
JPS6418264A true JPS6418264A (en) 1989-01-23

Family

ID=15978476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17443587A Pending JPS6418264A (en) 1987-07-13 1987-07-13 Metal insulator semiconductor transistor and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS6418264A (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5552232A (en) * 1978-10-12 1980-04-16 Toshiba Corp Manufacture of semiconductor device
JPS57197866A (en) * 1981-05-29 1982-12-04 Nec Corp Semiconductor integrated circuit
JPS61208271A (ja) * 1985-03-13 1986-09-16 Matsushita Electronics Corp Ｍｉｓ型半導体装置の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5552232A (en) * 1978-10-12 1980-04-16 Toshiba Corp Manufacture of semiconductor device
JPS57197866A (en) * 1981-05-29 1982-12-04 Nec Corp Semiconductor integrated circuit
JPS61208271A (ja) * 1985-03-13 1986-09-16 Matsushita Electronics Corp Ｍｉｓ型半導体装置の製造方法

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