JPS6412529A - Development of wafer - Google Patents

Development of wafer

Info

Publication number
JPS6412529A
JPS6412529A JP16932887A JP16932887A JPS6412529A JP S6412529 A JPS6412529 A JP S6412529A JP 16932887 A JP16932887 A JP 16932887A JP 16932887 A JP16932887 A JP 16932887A JP S6412529 A JPS6412529 A JP S6412529A
Authority
JP
Japan
Prior art keywords
developing
time
decided
cpt
tdt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16932887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0330284B2 (enrdf_load_stackoverflow
Inventor
Yoichi Minami
Atsushi Sekiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUMITOMO G C EE KK
SUMITOMO GCA KK
Original Assignee
SUMITOMO G C EE KK
SUMITOMO GCA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUMITOMO G C EE KK, SUMITOMO GCA KK filed Critical SUMITOMO G C EE KK
Priority to JP16932887A priority Critical patent/JPS6412529A/ja
Publication of JPS6412529A publication Critical patent/JPS6412529A/ja
Publication of JPH0330284B2 publication Critical patent/JPH0330284B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP16932887A 1987-07-07 1987-07-07 Development of wafer Granted JPS6412529A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16932887A JPS6412529A (en) 1987-07-07 1987-07-07 Development of wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16932887A JPS6412529A (en) 1987-07-07 1987-07-07 Development of wafer

Publications (2)

Publication Number Publication Date
JPS6412529A true JPS6412529A (en) 1989-01-17
JPH0330284B2 JPH0330284B2 (enrdf_load_stackoverflow) 1991-04-26

Family

ID=15884513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16932887A Granted JPS6412529A (en) 1987-07-07 1987-07-07 Development of wafer

Country Status (1)

Country Link
JP (1) JPS6412529A (enrdf_load_stackoverflow)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5158971A (ja) * 1974-11-20 1976-05-22 Nippon Naitoronikusu Kk Atsumikei
JPS57192954A (en) * 1981-05-23 1982-11-27 Dainippon Screen Mfg Co Ltd Surface processing method
JPS6263431A (ja) * 1985-09-13 1987-03-20 Mitsubishi Cable Ind Ltd 終点検出方法
JPS6249233U (enrdf_load_stackoverflow) * 1985-09-13 1987-03-26
JPS62193247A (ja) * 1986-02-20 1987-08-25 Fujitsu Ltd 現像終点決定方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5158971A (ja) * 1974-11-20 1976-05-22 Nippon Naitoronikusu Kk Atsumikei
JPS57192954A (en) * 1981-05-23 1982-11-27 Dainippon Screen Mfg Co Ltd Surface processing method
JPS6263431A (ja) * 1985-09-13 1987-03-20 Mitsubishi Cable Ind Ltd 終点検出方法
JPS6249233U (enrdf_load_stackoverflow) * 1985-09-13 1987-03-26
JPS62193247A (ja) * 1986-02-20 1987-08-25 Fujitsu Ltd 現像終点決定方法

Also Published As

Publication number Publication date
JPH0330284B2 (enrdf_load_stackoverflow) 1991-04-26

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