JPH0330284B2 - - Google Patents
Info
- Publication number
- JPH0330284B2 JPH0330284B2 JP62169328A JP16932887A JPH0330284B2 JP H0330284 B2 JPH0330284 B2 JP H0330284B2 JP 62169328 A JP62169328 A JP 62169328A JP 16932887 A JP16932887 A JP 16932887A JP H0330284 B2 JPH0330284 B2 JP H0330284B2
- Authority
- JP
- Japan
- Prior art keywords
- development
- time
- cpt
- tdt
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16932887A JPS6412529A (en) | 1987-07-07 | 1987-07-07 | Development of wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16932887A JPS6412529A (en) | 1987-07-07 | 1987-07-07 | Development of wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6412529A JPS6412529A (en) | 1989-01-17 |
| JPH0330284B2 true JPH0330284B2 (enrdf_load_stackoverflow) | 1991-04-26 |
Family
ID=15884513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16932887A Granted JPS6412529A (en) | 1987-07-07 | 1987-07-07 | Development of wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412529A (enrdf_load_stackoverflow) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5158971A (ja) * | 1974-11-20 | 1976-05-22 | Nippon Naitoronikusu Kk | Atsumikei |
| JPS57192954A (en) * | 1981-05-23 | 1982-11-27 | Dainippon Screen Mfg Co Ltd | Surface processing method |
| JPS6263431A (ja) * | 1985-09-13 | 1987-03-20 | Mitsubishi Cable Ind Ltd | 終点検出方法 |
| JPS6249233U (enrdf_load_stackoverflow) * | 1985-09-13 | 1987-03-26 | ||
| JPS62193247A (ja) * | 1986-02-20 | 1987-08-25 | Fujitsu Ltd | 現像終点決定方法 |
-
1987
- 1987-07-07 JP JP16932887A patent/JPS6412529A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6412529A (en) | 1989-01-17 |
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