JPS5639543A - Manufacture of chromium mask - Google Patents

Manufacture of chromium mask

Info

Publication number
JPS5639543A
JPS5639543A JP11490179A JP11490179A JPS5639543A JP S5639543 A JPS5639543 A JP S5639543A JP 11490179 A JP11490179 A JP 11490179A JP 11490179 A JP11490179 A JP 11490179A JP S5639543 A JPS5639543 A JP S5639543A
Authority
JP
Japan
Prior art keywords
pattern
mask
chromium
break
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11490179A
Other languages
Japanese (ja)
Inventor
Takayuki Ichinohe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu General Ltd
Gen Co Ltd
Original Assignee
Fujitsu General Ltd
Gen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu General Ltd, Gen Co Ltd filed Critical Fujitsu General Ltd
Priority to JP11490179A priority Critical patent/JPS5639543A/en
Publication of JPS5639543A publication Critical patent/JPS5639543A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/72—Repair or correction of mask defects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To obtain a chromium mask with corrected pattern break and short by repeating the process from the formation of a resist pattern to the rough correction of the pattern break and etching twice. CONSTITUTION:The pattern of an emulsion negative is printed on mask substrate 5 with chromium or chromium oxide layer 6 and photoresist 7 coated. Break 8 of the resulting resist pattern is boldly corrected 10 by resist potting, yet pattern short 9 is left as it is. Etching and resist removal are then carried out to form a chromium mask. The whole surface of the mask is coated with photoresist 7 again, and etching and resist removal are carried out similarly. Thus, a break- and short-free chromium mask is manufctured.
JP11490179A 1979-09-07 1979-09-07 Manufacture of chromium mask Pending JPS5639543A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11490179A JPS5639543A (en) 1979-09-07 1979-09-07 Manufacture of chromium mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11490179A JPS5639543A (en) 1979-09-07 1979-09-07 Manufacture of chromium mask

Publications (1)

Publication Number Publication Date
JPS5639543A true JPS5639543A (en) 1981-04-15

Family

ID=14649464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11490179A Pending JPS5639543A (en) 1979-09-07 1979-09-07 Manufacture of chromium mask

Country Status (1)

Country Link
JP (1) JPS5639543A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054368U (en) * 1983-09-22 1985-04-16 日本電気株式会社 hybrid integrated circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054368U (en) * 1983-09-22 1985-04-16 日本電気株式会社 hybrid integrated circuit

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