JPS5365667A - Optical mask - Google Patents

Optical mask

Info

Publication number
JPS5365667A
JPS5365667A JP14167776A JP14167776A JPS5365667A JP S5365667 A JPS5365667 A JP S5365667A JP 14167776 A JP14167776 A JP 14167776A JP 14167776 A JP14167776 A JP 14167776A JP S5365667 A JPS5365667 A JP S5365667A
Authority
JP
Japan
Prior art keywords
mask
optical mask
master
mask surface
2w3μm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14167776A
Other languages
Japanese (ja)
Inventor
Teruo Iino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14167776A priority Critical patent/JPS5365667A/en
Publication of JPS5365667A publication Critical patent/JPS5365667A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To avoid an attachment between the master mask and the print mask at the pattern region by making the scribe region of the master mask surface protrude by 2W3μm over the mask surface. As a result, the adhesion of the masks to each other and the exfoliation of the resist can be avoided.
COPYRIGHT: (C)1978,JPO&Japio
JP14167776A 1976-11-24 1976-11-24 Optical mask Pending JPS5365667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14167776A JPS5365667A (en) 1976-11-24 1976-11-24 Optical mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14167776A JPS5365667A (en) 1976-11-24 1976-11-24 Optical mask

Publications (1)

Publication Number Publication Date
JPS5365667A true JPS5365667A (en) 1978-06-12

Family

ID=15297622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14167776A Pending JPS5365667A (en) 1976-11-24 1976-11-24 Optical mask

Country Status (1)

Country Link
JP (1) JPS5365667A (en)

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