JPS6410097B2 - - Google Patents

Info

Publication number
JPS6410097B2
JPS6410097B2 JP6956181A JP6956181A JPS6410097B2 JP S6410097 B2 JPS6410097 B2 JP S6410097B2 JP 6956181 A JP6956181 A JP 6956181A JP 6956181 A JP6956181 A JP 6956181A JP S6410097 B2 JPS6410097 B2 JP S6410097B2
Authority
JP
Japan
Prior art keywords
whiskers
film
wiring
depth
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6956181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57183053A (en
Inventor
Hiromi Sakurai
Yoichi Akasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6956181A priority Critical patent/JPS57183053A/ja
Priority to DE19823217026 priority patent/DE3217026A1/de
Publication of JPS57183053A publication Critical patent/JPS57183053A/ja
Priority to US06/717,597 priority patent/US4899206A/en
Publication of JPS6410097B2 publication Critical patent/JPS6410097B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP6956181A 1981-05-06 1981-05-06 Semiconductor device Granted JPS57183053A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP6956181A JPS57183053A (en) 1981-05-06 1981-05-06 Semiconductor device
DE19823217026 DE3217026A1 (de) 1981-05-06 1982-05-06 Halbleitervorrichtung
US06/717,597 US4899206A (en) 1981-05-06 1985-04-01 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6956181A JPS57183053A (en) 1981-05-06 1981-05-06 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS57183053A JPS57183053A (en) 1982-11-11
JPS6410097B2 true JPS6410097B2 (cs) 1989-02-21

Family

ID=13406285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6956181A Granted JPS57183053A (en) 1981-05-06 1981-05-06 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS57183053A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4890151A (en) * 1983-03-12 1989-12-26 Ricoh Company, Ltd. Thin-film and its forming method
JPH07120655B2 (ja) * 1988-10-25 1995-12-20 三菱電機株式会社 半導体装置およびその製造方法
US7157381B2 (en) * 2004-06-15 2007-01-02 Infineon Technologies Ag Method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated circuits

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55158649A (en) * 1979-05-30 1980-12-10 Fujitsu Ltd Manufacture of electrode wiring
JPS57124431A (en) * 1981-01-27 1982-08-03 Toshiba Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS57183053A (en) 1982-11-11

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