JPS638896Y2 - - Google Patents
Info
- Publication number
- JPS638896Y2 JPS638896Y2 JP1984080899U JP8089984U JPS638896Y2 JP S638896 Y2 JPS638896 Y2 JP S638896Y2 JP 1984080899 U JP1984080899 U JP 1984080899U JP 8089984 U JP8089984 U JP 8089984U JP S638896 Y2 JPS638896 Y2 JP S638896Y2
- Authority
- JP
- Japan
- Prior art keywords
- trimming
- pattern
- data
- chromium
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical group [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 35
- 238000009966 trimming Methods 0.000 claims description 24
- 229910052804 chromium Inorganic materials 0.000 claims description 17
- 239000011651 chromium Substances 0.000 claims description 17
- 239000010409 thin film Substances 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 230000007261 regionalization Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 description 10
- 239000010408 film Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 238000010894 electron beam technology Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000018109 developmental process Effects 0.000 description 4
- 238000000609 electron-beam lithography Methods 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- AYWNRWBCTZIUEZ-UHFFFAOYSA-N chromium(3+) oxygen(2-) Chemical compound [O-2].[Cr+3].[Cr+3].[O-2].[Cr+3] AYWNRWBCTZIUEZ-UHFFFAOYSA-N 0.000 description 1
- UOUJSJZBMCDAEU-UHFFFAOYSA-N chromium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Cr+3].[Cr+3] UOUJSJZBMCDAEU-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000087 laser glass Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984080899U JPS60193549U (ja) | 1984-05-31 | 1984-05-31 | 表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984080899U JPS60193549U (ja) | 1984-05-31 | 1984-05-31 | 表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60193549U JPS60193549U (ja) | 1985-12-23 |
| JPS638896Y2 true JPS638896Y2 (enrdf_load_stackoverflow) | 1988-03-16 |
Family
ID=30627180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984080899U Granted JPS60193549U (ja) | 1984-05-31 | 1984-05-31 | 表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60193549U (enrdf_load_stackoverflow) |
-
1984
- 1984-05-31 JP JP1984080899U patent/JPS60193549U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60193549U (ja) | 1985-12-23 |
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