JPH0438833B2 - - Google Patents

Info

Publication number
JPH0438833B2
JPH0438833B2 JP58161576A JP16157683A JPH0438833B2 JP H0438833 B2 JPH0438833 B2 JP H0438833B2 JP 58161576 A JP58161576 A JP 58161576A JP 16157683 A JP16157683 A JP 16157683A JP H0438833 B2 JPH0438833 B2 JP H0438833B2
Authority
JP
Japan
Prior art keywords
laser
light
laser beam
coherence
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58161576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6052822A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58161576A priority Critical patent/JPS6052822A/ja
Publication of JPS6052822A publication Critical patent/JPS6052822A/ja
Publication of JPH0438833B2 publication Critical patent/JPH0438833B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Chemical Vapour Deposition (AREA)
  • Lasers (AREA)
JP58161576A 1983-09-02 1983-09-02 レーザcvd装置 Granted JPS6052822A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58161576A JPS6052822A (ja) 1983-09-02 1983-09-02 レーザcvd装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58161576A JPS6052822A (ja) 1983-09-02 1983-09-02 レーザcvd装置

Publications (2)

Publication Number Publication Date
JPS6052822A JPS6052822A (ja) 1985-03-26
JPH0438833B2 true JPH0438833B2 (enrdf_load_stackoverflow) 1992-06-25

Family

ID=15737740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58161576A Granted JPS6052822A (ja) 1983-09-02 1983-09-02 レーザcvd装置

Country Status (1)

Country Link
JP (1) JPS6052822A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08879B2 (ja) * 1985-03-15 1996-01-10 株式会社クラレ 耐水性組成物
JP2677860B2 (ja) * 1989-03-20 1997-11-17 三菱電機株式会社 レーザ光照射装置
KR100480435B1 (ko) * 2002-07-05 2005-04-06 민성욱 레이저 마킹 시스템의 자동 마킹위치 판별장치
US8262235B2 (en) 2007-08-09 2012-09-11 Konica Minolta Opto, Inc. Laser projector and image projection method for projecting an image with reduced speckles on the projected laser light image
CN101434005B (zh) 2008-11-20 2011-05-25 武汉凌云光电科技有限责任公司 多通道非晶硅太阳能板激光刻膜机
US9981457B2 (en) * 2013-09-18 2018-05-29 Semiconductor Emergy Laboratory Co., Ltd. Manufacturing apparatus of stack
JP6753347B2 (ja) * 2016-03-31 2020-09-09 Agc株式会社 ガラス基板の製造方法、ガラス基板に孔を形成する方法、およびガラス基板に孔を形成する装置
US11123822B2 (en) * 2016-03-31 2021-09-21 AGC Inc. Manufacturing method for glass substrate, method for forming hole in glass substrate, and apparatus for forming hole in glass substrate

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5423259B2 (enrdf_load_stackoverflow) * 1973-10-22 1979-08-13
JPS5565940A (en) * 1978-11-13 1980-05-17 Matsushita Electric Ind Co Ltd Laser image display device

Also Published As

Publication number Publication date
JPS6052822A (ja) 1985-03-26

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