JPS6052822A - レーザｃｖｄ装置 - Google Patents

レーザｃｖｄ装置

Info

Publication number
JPS6052822A
JPS6052822A JP58161576A JP16157683A JPS6052822A JP S6052822 A JPS6052822 A JP S6052822A JP 58161576 A JP58161576 A JP 58161576A JP 16157683 A JP16157683 A JP 16157683A JP S6052822 A JPS6052822 A JP S6052822A
Authority
JP
Japan
Prior art keywords
mirror
laser
laser light
light
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58161576A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438833B2 (enrdf_load_stackoverflow
Inventor
Hiromi Kumagai
熊谷　浩洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP58161576A priority Critical patent/JPS6052822A/ja
Publication of JPS6052822A publication Critical patent/JPS6052822A/ja
Publication of JPH0438833B2 publication Critical patent/JPH0438833B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Chemical Vapour Deposition (AREA)
  • Lasers (AREA)
JP58161576A 1983-09-02 1983-09-02 レーザｃｖｄ装置 Granted JPS6052822A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58161576A JPS6052822A (ja) 1983-09-02 1983-09-02 レーザｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58161576A JPS6052822A (ja) 1983-09-02 1983-09-02 レーザｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6052822A true JPS6052822A (ja) 1985-03-26
JPH0438833B2 JPH0438833B2 (enrdf_load_stackoverflow) 1992-06-25

Family

ID=15737740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58161576A Granted JPS6052822A (ja) 1983-09-02 1983-09-02 レーザｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS6052822A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61211356A (ja) * 1985-03-15 1986-09-19 Kuraray Co Ltd 耐水性組成物
JPH02248041A (ja) * 1989-03-20 1990-10-03 Mitsubishi Electric Corp レーザ光照射装置
KR100480435B1 (ko) * 2002-07-05 2005-04-06 민성욱 레이저 마킹 시스템의 자동 마킹위치 판별장치
CN101434005B (zh) 2008-11-20 2011-05-25 武汉凌云光电科技有限责任公司 多通道非晶硅太阳能板激光刻膜机
US8262235B2 (en) 2007-08-09 2012-09-11 Konica Minolta Opto, Inc. Laser projector and image projection method for projecting an image with reduced speckles on the projected laser light image
JP2017186240A (ja) * 2016-03-31 2017-10-12 旭硝子株式会社 ガラス基板の製造方法、ガラス基板に孔を形成する方法、およびガラス基板に孔を形成する装置
JP2019091698A (ja) * 2013-09-18 2019-06-13 株式会社半導体エネルギー研究所 積層体の作製装置
US11123822B2 (en) * 2016-03-31 2021-09-21 AGC Inc. Manufacturing method for glass substrate, method for forming hole in glass substrate, and apparatus for forming hole in glass substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068347A (enrdf_load_stackoverflow) * 1973-10-22 1975-06-07
JPS5565940A (en) * 1978-11-13 1980-05-17 Matsushita Electric Ind Co Ltd Laser image display device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068347A (enrdf_load_stackoverflow) * 1973-10-22 1975-06-07
JPS5565940A (en) * 1978-11-13 1980-05-17 Matsushita Electric Ind Co Ltd Laser image display device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61211356A (ja) * 1985-03-15 1986-09-19 Kuraray Co Ltd 耐水性組成物
JPH02248041A (ja) * 1989-03-20 1990-10-03 Mitsubishi Electric Corp レーザ光照射装置
KR100480435B1 (ko) * 2002-07-05 2005-04-06 민성욱 레이저 마킹 시스템의 자동 마킹위치 판별장치
US8262235B2 (en) 2007-08-09 2012-09-11 Konica Minolta Opto, Inc. Laser projector and image projection method for projecting an image with reduced speckles on the projected laser light image
CN101434005B (zh) 2008-11-20 2011-05-25 武汉凌云光电科技有限责任公司 多通道非晶硅太阳能板激光刻膜机
JP2019091698A (ja) * 2013-09-18 2019-06-13 株式会社半導体エネルギー研究所 積層体の作製装置
JP2017186240A (ja) * 2016-03-31 2017-10-12 旭硝子株式会社 ガラス基板の製造方法、ガラス基板に孔を形成する方法、およびガラス基板に孔を形成する装置
TWI725155B (zh) * 2016-03-31 2021-04-21 日商Ａｇｃ股份有限公司 玻璃基板之製造方法、於玻璃基板形成孔之方法、及於玻璃基板形成孔之裝置
US11123822B2 (en) * 2016-03-31 2021-09-21 AGC Inc. Manufacturing method for glass substrate, method for forming hole in glass substrate, and apparatus for forming hole in glass substrate

Also Published As

Publication number Publication date
JPH0438833B2 (enrdf_load_stackoverflow) 1992-06-25

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