JPS6387737A - ウエハ搬送装置 - Google Patents

ウエハ搬送装置

Info

Publication number
JPS6387737A
JPS6387737A JP61231287A JP23128786A JPS6387737A JP S6387737 A JPS6387737 A JP S6387737A JP 61231287 A JP61231287 A JP 61231287A JP 23128786 A JP23128786 A JP 23128786A JP S6387737 A JPS6387737 A JP S6387737A
Authority
JP
Japan
Prior art keywords
wafer
motor
ball screw
arm
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61231287A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573259B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Yanagida
柳田　博司
Hideji Yoshikawa
秀司 吉川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP61231287A priority Critical patent/JPS6387737A/ja
Publication of JPS6387737A publication Critical patent/JPS6387737A/ja
Publication of JPH0573259B2 publication Critical patent/JPH0573259B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
JP61231287A 1986-10-01 1986-10-01 ウエハ搬送装置 Granted JPS6387737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61231287A JPS6387737A (ja) 1986-10-01 1986-10-01 ウエハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61231287A JPS6387737A (ja) 1986-10-01 1986-10-01 ウエハ搬送装置

Publications (2)

Publication Number Publication Date
JPS6387737A true JPS6387737A (ja) 1988-04-19
JPH0573259B2 JPH0573259B2 (enrdf_load_stackoverflow) 1993-10-14

Family

ID=16921238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61231287A Granted JPS6387737A (ja) 1986-10-01 1986-10-01 ウエハ搬送装置

Country Status (1)

Country Link
JP (1) JPS6387737A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01316191A (ja) * 1988-06-14 1989-12-21 Seiko Seiki Co Ltd 磁気浮上搬送装置
CN102530536A (zh) * 2011-11-21 2012-07-04 杭州长川科技有限公司 集成电路收料装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149748A (en) * 1981-03-12 1982-09-16 Anelva Corp Treating device for substrate
JPS59105335A (ja) * 1982-12-09 1984-06-18 Toshiba Corp ウエハ支持装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149748A (en) * 1981-03-12 1982-09-16 Anelva Corp Treating device for substrate
JPS59105335A (ja) * 1982-12-09 1984-06-18 Toshiba Corp ウエハ支持装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01316191A (ja) * 1988-06-14 1989-12-21 Seiko Seiki Co Ltd 磁気浮上搬送装置
CN102530536A (zh) * 2011-11-21 2012-07-04 杭州长川科技有限公司 集成电路收料装置

Also Published As

Publication number Publication date
JPH0573259B2 (enrdf_load_stackoverflow) 1993-10-14

Similar Documents

Publication Publication Date Title
TW386929B (en) Substrate transport apparutus
TWI783940B (zh) 基板處理裝置及處理基板之方法
US6485250B2 (en) Substrate transport apparatus with multiple arms on a common axis of rotation
KR101398665B1 (ko) 이중 스카라 아암
EP1801046B1 (en) Transfer apparatus
IE820902L (en) Robot
JPH02233416A (ja) 物品の分配装置
JPH08118168A (ja) ロボットによる歯車の自動組立装置
JPH1133951A (ja) ２アーム方式の搬送用ロボット装置
JPH09285982A (ja) 薄型ワーク搬送装置
JPS6387737A (ja) ウエハ搬送装置
US20010002569A1 (en) Apparatus for cutting adhesive tape mounted on semiconductor wafer
JP3505920B2 (ja) 円筒形電池用ラベル巻き付け方法及び装置
JP2947380B2 (ja) プラズマ処理装置
GR3001639T3 (en) Method and device for drawing wire
JPH01108740A (ja) 半導体ウエハの搬送位置決め方式
JP2855766B2 (ja) ハンドリングロボット
JP2506356B2 (ja) ウエハ搬送装置
TWI818096B (zh) 基板處理裝置、操作基板處理裝置之方法，及在基板處理裝置中處理基板之方法
JPS6057942A (ja) ペレツトマウント装置
JPH08306759A (ja) ウェーハ面取り機における搬送アーム水平駆動装置
JPS6190898A (ja) 帯材切断装置
JP3131451B2 (ja) ワーク実装装置
JPH01125947A (ja) 半導体ウェハーの保護膜剥離装置
JPH07164291A (ja) ウェーハ外周部の研磨装置