JPH0573259B2 - - Google Patents

Info

Publication number
JPH0573259B2
JPH0573259B2 JP61231287A JP23128786A JPH0573259B2 JP H0573259 B2 JPH0573259 B2 JP H0573259B2 JP 61231287 A JP61231287 A JP 61231287A JP 23128786 A JP23128786 A JP 23128786A JP H0573259 B2 JPH0573259 B2 JP H0573259B2
Authority
JP
Japan
Prior art keywords
wafer
ball screw
rotating shaft
motor
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61231287A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6387737A (ja
Inventor
Hiroshi Yanagida
Hideji Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP61231287A priority Critical patent/JPS6387737A/ja
Publication of JPS6387737A publication Critical patent/JPS6387737A/ja
Publication of JPH0573259B2 publication Critical patent/JPH0573259B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
JP61231287A 1986-10-01 1986-10-01 ウエハ搬送装置 Granted JPS6387737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61231287A JPS6387737A (ja) 1986-10-01 1986-10-01 ウエハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61231287A JPS6387737A (ja) 1986-10-01 1986-10-01 ウエハ搬送装置

Publications (2)

Publication Number Publication Date
JPS6387737A JPS6387737A (ja) 1988-04-19
JPH0573259B2 true JPH0573259B2 (enrdf_load_stackoverflow) 1993-10-14

Family

ID=16921238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61231287A Granted JPS6387737A (ja) 1986-10-01 1986-10-01 ウエハ搬送装置

Country Status (1)

Country Link
JP (1) JPS6387737A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2622523B2 (ja) * 1988-06-14 1997-06-18 セイコー精機株式会社 磁気浮上搬送装置
CN102530536B (zh) * 2011-11-21 2013-12-18 杭州长川科技有限公司 集成电路收料装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149748A (en) * 1981-03-12 1982-09-16 Anelva Corp Treating device for substrate
JPS59105335A (ja) * 1982-12-09 1984-06-18 Toshiba Corp ウエハ支持装置

Also Published As

Publication number Publication date
JPS6387737A (ja) 1988-04-19

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