JPS6367333B2 - - Google Patents
Info
- Publication number
- JPS6367333B2 JPS6367333B2 JP57210264A JP21026482A JPS6367333B2 JP S6367333 B2 JPS6367333 B2 JP S6367333B2 JP 57210264 A JP57210264 A JP 57210264A JP 21026482 A JP21026482 A JP 21026482A JP S6367333 B2 JPS6367333 B2 JP S6367333B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- tantalum oxide
- oxide film
- capacitor
- tantalum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57210264A JPS5999726A (ja) | 1982-11-29 | 1982-11-29 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57210264A JPS5999726A (ja) | 1982-11-29 | 1982-11-29 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5999726A JPS5999726A (ja) | 1984-06-08 |
| JPS6367333B2 true JPS6367333B2 (https=) | 1988-12-26 |
Family
ID=16586502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57210264A Granted JPS5999726A (ja) | 1982-11-29 | 1982-11-29 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5999726A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0468758B1 (en) * | 1990-07-24 | 1997-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming insulating films, capacitances, and semiconductor devices |
| US7335570B1 (en) | 1990-07-24 | 2008-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming insulating films, capacitances, and semiconductor devices |
-
1982
- 1982-11-29 JP JP57210264A patent/JPS5999726A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5999726A (ja) | 1984-06-08 |
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