JPS6366407A - 螢光ｘ線膜厚計に於ける測定点調整方法 - Google Patents

螢光ｘ線膜厚計に於ける測定点調整方法

Info

Publication number
JPS6366407A
JPS6366407A JP20952687A JP20952687A JPS6366407A JP S6366407 A JPS6366407 A JP S6366407A JP 20952687 A JP20952687 A JP 20952687A JP 20952687 A JP20952687 A JP 20952687A JP S6366407 A JPS6366407 A JP S6366407A
Authority
JP
Japan
Prior art keywords
fluorescent
rays
sample
film thickness
metals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20952687A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6352329B2 (enrdf_load_stackoverflow
Inventor
Minoru Handa
伴田　稔
Hiroshi Ishijima
石島　博史
Toshiyuki Koga
古賀　敏行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP20952687A priority Critical patent/JPS6366407A/ja
Publication of JPS6366407A publication Critical patent/JPS6366407A/ja
Publication of JPS6352329B2 publication Critical patent/JPS6352329B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP20952687A 1987-08-24 1987-08-24 螢光ｘ線膜厚計に於ける測定点調整方法 Granted JPS6366407A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20952687A JPS6366407A (ja) 1987-08-24 1987-08-24 螢光ｘ線膜厚計に於ける測定点調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20952687A JPS6366407A (ja) 1987-08-24 1987-08-24 螢光ｘ線膜厚計に於ける測定点調整方法

Publications (2)

Publication Number Publication Date
JPS6366407A true JPS6366407A (ja) 1988-03-25
JPS6352329B2 JPS6352329B2 (enrdf_load_stackoverflow) 1988-10-18

Family

ID=16574250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20952687A Granted JPS6366407A (ja) 1987-08-24 1987-08-24 螢光ｘ線膜厚計に於ける測定点調整方法

Country Status (1)

Country Link
JP (1) JPS6366407A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06102032A (ja) * 1992-03-30 1994-04-12 Seiko Instr Inc 蛍光ｘ線膜厚測定方法
CN112044805A (zh) * 2020-09-28 2020-12-08 秦宇 一种金属检测仪

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06102032A (ja) * 1992-03-30 1994-04-12 Seiko Instr Inc 蛍光ｘ線膜厚測定方法
CN112044805A (zh) * 2020-09-28 2020-12-08 秦宇 一种金属检测仪
CN112044805B (zh) * 2020-09-28 2022-02-01 广东艾斯瑞仪器科技有限公司 一种金属检测仪

Also Published As

Publication number Publication date
JPS6352329B2 (enrdf_load_stackoverflow) 1988-10-18

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