JPS6352329B2 - - Google Patents

Info

Publication number
JPS6352329B2
JPS6352329B2 JP62209526A JP20952687A JPS6352329B2 JP S6352329 B2 JPS6352329 B2 JP S6352329B2 JP 62209526 A JP62209526 A JP 62209526A JP 20952687 A JP20952687 A JP 20952687A JP S6352329 B2 JPS6352329 B2 JP S6352329B2
Authority
JP
Japan
Prior art keywords
sample
fluorescent
ray
sample table
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP62209526A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6366407A (ja
Inventor
Minoru Handa
Hiroshi Ishijima
Toshuki Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP20952687A priority Critical patent/JPS6366407A/ja
Publication of JPS6366407A publication Critical patent/JPS6366407A/ja
Publication of JPS6352329B2 publication Critical patent/JPS6352329B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP20952687A 1987-08-24 1987-08-24 螢光ｘ線膜厚計に於ける測定点調整方法 Granted JPS6366407A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20952687A JPS6366407A (ja) 1987-08-24 1987-08-24 螢光ｘ線膜厚計に於ける測定点調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20952687A JPS6366407A (ja) 1987-08-24 1987-08-24 螢光ｘ線膜厚計に於ける測定点調整方法

Publications (2)

Publication Number Publication Date
JPS6366407A JPS6366407A (ja) 1988-03-25
JPS6352329B2 true JPS6352329B2 (enrdf_load_stackoverflow) 1988-10-18

Family

ID=16574250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20952687A Granted JPS6366407A (ja) 1987-08-24 1987-08-24 螢光ｘ線膜厚計に於ける測定点調整方法

Country Status (1)

Country Link
JP (1) JPS6366407A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2829454B2 (ja) * 1992-03-30 1998-11-25 セイコーインスツルメンツ株式会社 蛍光ｘ線膜厚測定方法
CN112044805B (zh) * 2020-09-28 2022-02-01 广东艾斯瑞仪器科技有限公司 一种金属检测仪

Also Published As

Publication number Publication date
JPS6366407A (ja) 1988-03-25

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