JPS6366407A - Adjustment of measuring point in fluorescent x-ray film thickness gage - Google Patents

Abstract

PURPOSE:To enable a position on which X-rays radiated from a collimator are irradiated to be easily and accurately observed by providing a metallic detecting plate wherein a set of different kind metals are integrated on an X-Y specimen stage. CONSTITUTION:A detecting metallic plate 10 wherein first and second metals 8 and 9, respectively, are integrated is located on an X-Y table 4. Since the leading end portion 12 of a micrometer head 11 is connected to the X-Y table 4, it can minutely move in directions shown by arrows A. The first metal 8 is composed of aluminum that scarcely emits fluorescent X-rays and the second metal 9 is composed of brass that produces the fluorescent X-rays. Accordingly, when an X-ray beam is irradiated on the detecting metallic plate 10 via a collimator 3, it is made clear that the position of a point corresponding to the half of the maximum intensity of the fluorescent X-rays, namely, a point Xo in the X direction of the X-Y stage is a boundary position between the first and second metals 8 and 9, respectively, and the irradiating position of the fluorescent X-rays.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a measurement point setting device for a fluorescent X-ray film thickness meter, and in particular, a novel device for easily and accurately observing the position where X-rays irradiated from a collimator are irradiated. It is about improvement.

Previously used devices of this type had a mark on the fluorescent plate and visually measured the light-emitting point of the fluorescent plate under X-ray irradiation. Because the border with the non-irradiated area was not clear, it was difficult to match the cross scale marked on the microscope with the X-ray axis.
I went to sleep.

The purpose of this invention is to provide an extremely effective means for quickly eliminating the above-mentioned drawbacks, and in particular, it is an object of the present invention to provide an extremely effective means for quickly eliminating the above-mentioned drawbacks. In this configuration, a metal detection plate is provided to detect fluorescent X-rays from one of the metals to detect a boundary where the X-ray axis is a junction point of each metal, and to distinguish between the X-ray axes.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a measurement point detection device in a fluorescent X-ray film thickness meter according to the present invention will be described in detail below with reference to the drawings.

In the drawing, the reference numeral 1 indicates an X-ray source, and this X'! The X-rays from 1Aa1 pass through the collimator 3 of the shafter 2 and are irradiated onto the sample 5 on the XY sample stage 4.

Although this XY sample stage 4 is not shown in the drawing, it is provided so that it can move in the X and Y directions by an XY drive mechanism, and the XY sample stage 4 is moved by operating this XY drive mechanism, and the sample Any part of the body can be irradiated with X-rays.

A collimator 3 is installed at one end of the shutter 2 as shown in FIG.
is integrally provided, and a mirror 6 is provided at the other end.
is provided, and when viewed from the microscope 7 disposed on the side, the surface of the sample 5 reflected by the mirror 6 can be seen. or,
Fluorescent X-rays from sample 5 are detected by detector 7a.

Furthermore, the configuration shown in FIG. 3 shows a measurement point detection device according to the present invention, and a detection metal plate 10 in which first and second metals 8.9 are integrated as a sample is placed on the XY table 4. The XY table 4 is connected to the tip 12 of the micro head 1, so that it can be moved slightly in the direction of the arrow. Furthermore, the first and second metals are made of different metals, and the first metal 8 is aluminum, which hardly generates fluorescent X-rays.

The second metal is composed of a metal that generates fluorescent X-rays. Therefore, when the detection metal plate 10 is irradiated with the x)ffl beam through the collimator 3, as shown in FIG. It can be seen that the position (in terms of the feed amount of the XY stage) is the boundary position between the first and second metals 8.9, and is the irradiation position of the fluorescent X-rays.

Therefore, similar means can be used for the Y direction as well.

Since the device according to the present invention has the above-described configuration and operation, it is possible to accurately determine the position of the X-rays irradiated from the collimator, and the By combining YvA, the X-ray axis and the optical axis can be easily defeated.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing the overall configuration, FIGS. 2 and 3 are side views of main parts, and FIG. 4 is a characteristic diagram. 1...X-ray source 2...Shutter 3...Collimator 4...XY sample stage 5...Trial sample 4 6...Mirror 7...Microscope 7a...Detector 8.・First. Second metal 10...detection metal plate 11...micro head or more

Claims (1)

[Claims] (1) In film thickness measurement using a fluorescent X-ray film thickness meter, a sample with a boundary line made of two types of materials is placed on an XY sample table so that the boundary line is approximately parallel to the Y direction, and While irradiating the sample surface with X-rays and measuring the fluorescent X-ray intensity generated from only one material of the sample,
The sample table is moved in the X direction, the XY sample table is stopped at a position where the fluorescence Align with one line of the scale plate, further place the sample on the XY sample table so that the boundary line is approximately parallel to the X direction, irradiate the sample surface with X-rays, and While measuring the fluorescent X-ray intensity generated from only one material, move the XY sample table in the Y direction, and move the XY sample table to a position where the fluorescent X-ray intensity is half of the maximum intensity. Stop at
A method for adjusting a measuring point in a fluorescent X-ray film thickness meter, characterized in that the boundary line at the position is aligned with the other line of a cross scale plate of a microscope which is an optical observation means.