JPS6355641B2 - - Google Patents

Info

Publication number
JPS6355641B2
JPS6355641B2 JP55181142A JP18114280A JPS6355641B2 JP S6355641 B2 JPS6355641 B2 JP S6355641B2 JP 55181142 A JP55181142 A JP 55181142A JP 18114280 A JP18114280 A JP 18114280A JP S6355641 B2 JPS6355641 B2 JP S6355641B2
Authority
JP
Japan
Prior art keywords
light
measured
lens
displacement
receiving element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55181142A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57104808A (en
Inventor
Toshio Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP18114280A priority Critical patent/JPS57104808A/ja
Publication of JPS57104808A publication Critical patent/JPS57104808A/ja
Publication of JPS6355641B2 publication Critical patent/JPS6355641B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP18114280A 1980-12-20 1980-12-20 Shape measuring apparatus Granted JPS57104808A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18114280A JPS57104808A (en) 1980-12-20 1980-12-20 Shape measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18114280A JPS57104808A (en) 1980-12-20 1980-12-20 Shape measuring apparatus

Publications (2)

Publication Number Publication Date
JPS57104808A JPS57104808A (en) 1982-06-30
JPS6355641B2 true JPS6355641B2 (de) 1988-11-04

Family

ID=16095617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18114280A Granted JPS57104808A (en) 1980-12-20 1980-12-20 Shape measuring apparatus

Country Status (1)

Country Link
JP (1) JPS57104808A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8401649A (nl) * 1984-05-23 1985-12-16 Optische Ind De Oude Delft Nv Meetstelsel voor het, onder gebruikmaking van een op driehoeksmeting berustend principe, contactloos meten van de afstand tussen een bepaald punt van een objectvlak en een referentieniveau.
JPS6184580A (ja) * 1984-10-02 1986-04-30 Yukio Muto 変位量測定器
JPH0560532A (ja) * 1990-11-27 1993-03-09 Nkk Corp 光学式形状計
JPH051904A (ja) * 1990-11-27 1993-01-08 Nkk Corp 光学式形状計
JP5366476B2 (ja) * 2008-08-21 2013-12-11 大日本スクリーン製造株式会社 視覚装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315161A (en) * 1976-07-27 1978-02-10 Nec Corp Moving method for object to specified position by using laser beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315161A (en) * 1976-07-27 1978-02-10 Nec Corp Moving method for object to specified position by using laser beam

Also Published As

Publication number Publication date
JPS57104808A (en) 1982-06-30

Similar Documents

Publication Publication Date Title
US6428171B1 (en) Height measuring apparatus
US4677302A (en) Optical system for inspecting printed circuit boards wherein a ramp filter is disposed between reflected beam and photodetector
JP2943499B2 (ja) 高さ測定方法および装置
KR101273094B1 (ko) 광삼각법을 이용한 3차원 형상 측정기를 사용하여 ｐｃｂ 범프 높이 측정 방법
US4701053A (en) Mark position detecting method and apparatus
JP3113731B2 (ja) 部品実装検査方法及びその検査装置並びに該検査装置により検査された基板
US5090811A (en) Optical radius gauge
JP2000121324A (ja) 厚さ測定装置
EP0316624A2 (de) Abbildungs- und Inspektionapparat und Verfahren
JPS6355641B2 (de)
JPS5847209A (ja) 表面形状測定装置
JP4382315B2 (ja) ウェーハバンプの外観検査方法及びウェーハバンプの外観検査装置
JPS58201006A (ja) 立体形状検出装置
JP2987540B2 (ja) 三次元スキャナー
JPS6316892A (ja) レ−ザ加工装置用測距装置
JPH0560529A (ja) 高さ測定装置
JP2986025B2 (ja) 基板の検査方法
JPH08304068A (ja) 距離計測装置及びその方法
JPS61112905A (ja) 光応用計測装置
US5631738A (en) Laser ranging system having reduced sensitivity to surface defects
JPH0240506A (ja) 測距装置
JP2004528580A (ja) ビデオ画像を使用下光学的表面検査のためのサンプル位置付けシステム及びその方法
JPH02124412A (ja) 位置測定装置
JP2006010544A (ja) 異物検査装置および異物検査方法
KR970004476B1 (ko) 웨이퍼 정렬시스템의 웨이퍼 수평상태 자동측정장치