JPS57104808A - Shape measuring apparatus - Google Patents

Shape measuring apparatus

Info

Publication number
JPS57104808A
JPS57104808A JP18114280A JP18114280A JPS57104808A JP S57104808 A JPS57104808 A JP S57104808A JP 18114280 A JP18114280 A JP 18114280A JP 18114280 A JP18114280 A JP 18114280A JP S57104808 A JPS57104808 A JP S57104808A
Authority
JP
Japan
Prior art keywords
light
currents
circuits
irradiated
photo detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18114280A
Other languages
Japanese (ja)
Other versions
JPS6355641B2 (en
Inventor
Toshio Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP18114280A priority Critical patent/JPS57104808A/en
Publication of JPS57104808A publication Critical patent/JPS57104808A/en
Publication of JPS6355641B2 publication Critical patent/JPS6355641B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object

Abstract

PURPOSE:To measure the shape of the surface of an object in a non-contact manner at a high speed by measuring a distance to an object with the irradiating of a light beam on the object while scanning it. CONSTITUTION:When irradiated on a scanner 2, lights from first and second light sources I1 and I2 modulated by frequencies f1 and f2 scan over an object 4 to be measured and the reflected beams are irradiated on a photo detector 6. Light currents i1 and i2 according to the position of the light spot of the reflected beams from the photo detector 6 are separated at respective frequencies 51 and 52 with filters 81 and 84. After computed with respective subtraction circuits 91 and 92, addition circuit 101 and 102 and division circuits 111 and 112, light currents i1 and i2 by light from a first light source I1 and light currents i1 and i2 by light from a second light source I2 are corrected linearly with linear correction circuits 121 and 122 and inputted into a displacement arithmetic device 13, where the displacement of the object is calculated and outputted.
JP18114280A 1980-12-20 1980-12-20 Shape measuring apparatus Granted JPS57104808A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18114280A JPS57104808A (en) 1980-12-20 1980-12-20 Shape measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18114280A JPS57104808A (en) 1980-12-20 1980-12-20 Shape measuring apparatus

Publications (2)

Publication Number Publication Date
JPS57104808A true JPS57104808A (en) 1982-06-30
JPS6355641B2 JPS6355641B2 (en) 1988-11-04

Family

ID=16095617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18114280A Granted JPS57104808A (en) 1980-12-20 1980-12-20 Shape measuring apparatus

Country Status (1)

Country Link
JP (1) JPS57104808A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184580A (en) * 1984-10-02 1986-04-30 Yukio Muto Measuring instrument for quantity of displacement
US4673817A (en) * 1984-05-23 1987-06-16 N.V. Optische Industrie De Oude Delft Measuring system for contactless measuring the distance between a predetermined point of an object surface and a reference level
JPH051904A (en) * 1990-11-27 1993-01-08 Nkk Corp Optical shape measuring instrument
JPH0560532A (en) * 1990-11-27 1993-03-09 Nkk Corp Optical shape measurement instrument
JP2010048662A (en) * 2008-08-21 2010-03-04 Dainippon Screen Mfg Co Ltd Visual system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315161A (en) * 1976-07-27 1978-02-10 Nec Corp Moving method for object to specified position by using laser beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315161A (en) * 1976-07-27 1978-02-10 Nec Corp Moving method for object to specified position by using laser beam

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4673817A (en) * 1984-05-23 1987-06-16 N.V. Optische Industrie De Oude Delft Measuring system for contactless measuring the distance between a predetermined point of an object surface and a reference level
JPS6184580A (en) * 1984-10-02 1986-04-30 Yukio Muto Measuring instrument for quantity of displacement
JPH051904A (en) * 1990-11-27 1993-01-08 Nkk Corp Optical shape measuring instrument
JPH0560532A (en) * 1990-11-27 1993-03-09 Nkk Corp Optical shape measurement instrument
JP2010048662A (en) * 2008-08-21 2010-03-04 Dainippon Screen Mfg Co Ltd Visual system

Also Published As

Publication number Publication date
JPS6355641B2 (en) 1988-11-04

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