JPS5569005A - Pattern inspection method - Google Patents

Pattern inspection method

Info

Publication number
JPS5569005A
JPS5569005A JP14309778A JP14309778A JPS5569005A JP S5569005 A JPS5569005 A JP S5569005A JP 14309778 A JP14309778 A JP 14309778A JP 14309778 A JP14309778 A JP 14309778A JP S5569005 A JPS5569005 A JP S5569005A
Authority
JP
Japan
Prior art keywords
board
signal
width
distribution
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14309778A
Other languages
Japanese (ja)
Inventor
Moritoshi Ando
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14309778A priority Critical patent/JPS5569005A/en
Publication of JPS5569005A publication Critical patent/JPS5569005A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To perform the measurement of pattern width having a given tilt angle formed on the board, by emitting the light beam in which the distribution of intensity is in line shape to the board and obtaining the distribution of transparent light intensity of the board, in the printed board.
CONSTITUTION: While emitting the laser light beam from the light source 2 on the printed board 1, the board 1 is moved in a given speed by the means 4a and 4b, and the transmitted light of the board 1 is received with the photo detector 3 and it is converted into the signal and fed to HPF5. The output of HPF5 is the signal having the peak value proportional to the gradient of the transmission light distribution curve at the boundary of the scanning sections on the board 1, this signal is compared with the reference value at the comparators 13W16, FF19 or 20 is set depending on the comparison output, and the clock from the generator 22 is counted 24 or 25. Further, the width of the conductive layer A orthogonal to the scanning lines from the counter 24, and the width of the conductive layer B having a given tilt angle to the layer A from the counter 25 are obtained.
COPYRIGHT: (C)1980,JPO&Japio
JP14309778A 1978-11-20 1978-11-20 Pattern inspection method Pending JPS5569005A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14309778A JPS5569005A (en) 1978-11-20 1978-11-20 Pattern inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14309778A JPS5569005A (en) 1978-11-20 1978-11-20 Pattern inspection method

Publications (1)

Publication Number Publication Date
JPS5569005A true JPS5569005A (en) 1980-05-24

Family

ID=15330833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14309778A Pending JPS5569005A (en) 1978-11-20 1978-11-20 Pattern inspection method

Country Status (1)

Country Link
JP (1) JPS5569005A (en)

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