JPS55117902A - Pattern check unit - Google Patents
Pattern check unitInfo
- Publication number
- JPS55117902A JPS55117902A JP2535779A JP2535779A JPS55117902A JP S55117902 A JPS55117902 A JP S55117902A JP 2535779 A JP2535779 A JP 2535779A JP 2535779 A JP2535779 A JP 2535779A JP S55117902 A JPS55117902 A JP S55117902A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- light
- pattern
- width
- counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make it possible to measure accurately a pattern with little measure error dependent upon substrate deflection, etc., by measuring the width and the length of the pattern, which is formed on the light transmitting substrate face, independently of a scanning light beam diameter.
CONSTITUTION: The light from laser light source 2 is irradiated to substrate 1 which moves in a fixed speed, and the transmission light is received by photo detector 3 and is converted to an electric signal and is inputted to comparators 8 and 9. In case of measurement of the width of the conductor layer on substrate 1, counter 10 starts counting clock pulses from the time when the transmission light intensity becomes, for example, the half of the peak value, and counter 10 continues counting until the light intensity if lowered and is increased again up to the half of the peak value. On a basis of this time interval and the known scanning speed, the pattern width on the conductor is measured.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2535779A JPS55117902A (en) | 1979-03-05 | 1979-03-05 | Pattern check unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2535779A JPS55117902A (en) | 1979-03-05 | 1979-03-05 | Pattern check unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55117902A true JPS55117902A (en) | 1980-09-10 |
Family
ID=12163588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2535779A Pending JPS55117902A (en) | 1979-03-05 | 1979-03-05 | Pattern check unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55117902A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58110041A (en) * | 1981-12-23 | 1983-06-30 | Fujitsu Ltd | Inspection of pattern |
-
1979
- 1979-03-05 JP JP2535779A patent/JPS55117902A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58110041A (en) * | 1981-12-23 | 1983-06-30 | Fujitsu Ltd | Inspection of pattern |
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