JPS55117902A - Pattern check unit - Google Patents

Pattern check unit

Info

Publication number
JPS55117902A
JPS55117902A JP2535779A JP2535779A JPS55117902A JP S55117902 A JPS55117902 A JP S55117902A JP 2535779 A JP2535779 A JP 2535779A JP 2535779 A JP2535779 A JP 2535779A JP S55117902 A JPS55117902 A JP S55117902A
Authority
JP
Japan
Prior art keywords
substrate
light
pattern
width
counter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2535779A
Other languages
Japanese (ja)
Inventor
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2535779A priority Critical patent/JPS55117902A/en
Publication of JPS55117902A publication Critical patent/JPS55117902A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make it possible to measure accurately a pattern with little measure error dependent upon substrate deflection, etc., by measuring the width and the length of the pattern, which is formed on the light transmitting substrate face, independently of a scanning light beam diameter.
CONSTITUTION: The light from laser light source 2 is irradiated to substrate 1 which moves in a fixed speed, and the transmission light is received by photo detector 3 and is converted to an electric signal and is inputted to comparators 8 and 9. In case of measurement of the width of the conductor layer on substrate 1, counter 10 starts counting clock pulses from the time when the transmission light intensity becomes, for example, the half of the peak value, and counter 10 continues counting until the light intensity if lowered and is increased again up to the half of the peak value. On a basis of this time interval and the known scanning speed, the pattern width on the conductor is measured.
COPYRIGHT: (C)1980,JPO&Japio
JP2535779A 1979-03-05 1979-03-05 Pattern check unit Pending JPS55117902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2535779A JPS55117902A (en) 1979-03-05 1979-03-05 Pattern check unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2535779A JPS55117902A (en) 1979-03-05 1979-03-05 Pattern check unit

Publications (1)

Publication Number Publication Date
JPS55117902A true JPS55117902A (en) 1980-09-10

Family

ID=12163588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2535779A Pending JPS55117902A (en) 1979-03-05 1979-03-05 Pattern check unit

Country Status (1)

Country Link
JP (1) JPS55117902A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110041A (en) * 1981-12-23 1983-06-30 Fujitsu Ltd Inspection of pattern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110041A (en) * 1981-12-23 1983-06-30 Fujitsu Ltd Inspection of pattern

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