JPS5555203A - Optical inspection apparatus - Google Patents

Optical inspection apparatus

Info

Publication number
JPS5555203A
JPS5555203A JP12829078A JP12829078A JPS5555203A JP S5555203 A JPS5555203 A JP S5555203A JP 12829078 A JP12829078 A JP 12829078A JP 12829078 A JP12829078 A JP 12829078A JP S5555203 A JPS5555203 A JP S5555203A
Authority
JP
Japan
Prior art keywords
reflection
start timing
inspection start
response speed
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12829078A
Other languages
Japanese (ja)
Inventor
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12829078A priority Critical patent/JPS5555203A/en
Publication of JPS5555203A publication Critical patent/JPS5555203A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable the use of a conversion element quick in the response speed and detect light beam entering the inspection area by means of a plurality of reflection devices, a photoelectric convertor for receiving reflected light from the reflection devices and an electric circuit for producing the inspection start timing signal.
CONSTITUTION: A laser beam irradiated vertically viewed from the plane of the drawing depicts on the surface of a reflection device 20 a pattern identical to the scanning pattern depicted on the printed board. Optical conversion elements 21W24 which are all quicker in the response speed than silicones, photo-diodes and the like receive reflected light from the respecitve reflection surfaces 20-1W20-4. A condenser is provided between reflection surfaces corresponding to respective optical conversion elements. Adders 25 and 26 and a comparator 29 combine to generate an inspection start timing signal for the vertical scanning. With such an arrangement, it is possible to form the reflecting surface for the reflection device at a high accuracy thereby ensuring the accurate inspection start timing signals.
COPYRIGHT: (C)1980,JPO&Japio
JP12829078A 1978-10-18 1978-10-18 Optical inspection apparatus Pending JPS5555203A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12829078A JPS5555203A (en) 1978-10-18 1978-10-18 Optical inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12829078A JPS5555203A (en) 1978-10-18 1978-10-18 Optical inspection apparatus

Publications (1)

Publication Number Publication Date
JPS5555203A true JPS5555203A (en) 1980-04-23

Family

ID=14981150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12829078A Pending JPS5555203A (en) 1978-10-18 1978-10-18 Optical inspection apparatus

Country Status (1)

Country Link
JP (1) JPS5555203A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2004089655A1 (en) * 2003-04-02 2006-07-06 株式会社ブリヂストン Rubberized fiber material and pneumatic tire

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2004089655A1 (en) * 2003-04-02 2006-07-06 株式会社ブリヂストン Rubberized fiber material and pneumatic tire
JP4511463B2 (en) * 2003-04-02 2010-07-28 株式会社ブリヂストン Rubberized fiber material and pneumatic tire

Similar Documents

Publication Publication Date Title
JPS55142254A (en) Inspecting method for pattern of printed wiring board
JPS569763A (en) Beam recording device
JPS53135653A (en) Photoelectric detecting optical device
JPS5793208A (en) Optical system of distance measuring apparatus
DE3864230D1 (en) Spark erosion machine.
JPS5555203A (en) Optical inspection apparatus
JPS574505A (en) Measuring method for statical property of roughed surface
ATE76187T1 (en) SENSOR WITH INTEGRATED SIGNAL PROCESSING FOR ONE TO THREE DIMENSIONAL POSITIONING.
JPS5676004A (en) Measuring device of flatness
JPS55154402A (en) Shape measuring apparatus
JPS57113342A (en) Eccentricity measurement
JPS54105967A (en) Defect test system for pattern featuring directivity
JPS5669505A (en) Laser position detecting device
JPS57168384A (en) Detecting method for shape of object
JPS5539022A (en) Optical thickness meter
JPS5693009A (en) Digital displacement transducer
JPS55164823A (en) Orthogonal projection image forming method of three-dimensional object
SU792271A1 (en) Method of determining pattern contour of plated layer on dielectric or semiconductor support
JPS5520406A (en) Shape examination unit
JPS5536730A (en) Displaced position detector
JPS54116959A (en) Wafer warp meter
JPS5417764A (en) Plane shape measuring system
JPS5456390A (en) Light detecting method
SU934217A1 (en) Device for inspection of moving object shape
JPS5472600A (en) Laser processing method