JPS5676004A - Measuring device of flatness - Google Patents
Measuring device of flatnessInfo
- Publication number
- JPS5676004A JPS5676004A JP15317079A JP15317079A JPS5676004A JP S5676004 A JPS5676004 A JP S5676004A JP 15317079 A JP15317079 A JP 15317079A JP 15317079 A JP15317079 A JP 15317079A JP S5676004 A JPS5676004 A JP S5676004A
- Authority
- JP
- Japan
- Prior art keywords
- grid image
- sample
- distortion
- image
- grid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To improve the accuracy of a measured degree of flatness by a method wherein a grid image intensity reflected by a sample surface to form an image is converted photoelectrically and the pitch of the grid image detected from the electronic signal and a reference pitch without a distortion are compared with each other.
CONSTITUTION: The grid LG which repeats a light and a dark alternately is made to form its image by a lens L and through a sample T. A photoelectric conversion element D is arranged at the image forming surface and either the photoelectric conversion element D or the light and dark boundary line of the grid image LGI is moved so that they cross each other, thus the variation of the grid image intensity is converted into a photoelectric value. And the absolute value of a difference between a reference pitch P'o of a grid image during a sample of a perfect mirror surface and having no distortion in a grid image LGI and a pitch P'i of a grid image when the sample is not smooth and having a distortion in the grid image LGI is divided by the reference pitch P'o of the grid image when no distortion to obtain a distortion factor. And using this distortion factor, the flatness of the sample is measured. In this way, the flatness of a sample can be measured with high accuracy.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15317079A JPS5676004A (en) | 1979-11-26 | 1979-11-26 | Measuring device of flatness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15317079A JPS5676004A (en) | 1979-11-26 | 1979-11-26 | Measuring device of flatness |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5676004A true JPS5676004A (en) | 1981-06-23 |
| JPH0211085B2 JPH0211085B2 (en) | 1990-03-12 |
Family
ID=15556577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15317079A Granted JPS5676004A (en) | 1979-11-26 | 1979-11-26 | Measuring device of flatness |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5676004A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5833155A (en) * | 1981-08-22 | 1983-02-26 | Datsuku Eng Kk | Flaw inspector for recording magnetic tape |
| JPS60119404A (en) * | 1983-12-01 | 1985-06-26 | Nippon Sheet Glass Co Ltd | Inspecting device for distortion of plate glass |
| WO1990006505A1 (en) * | 1988-11-28 | 1990-06-14 | Matsushita Electric Industrial Co., Ltd. | Method of and apparatus for detecting wrinkles in tapes |
| WO1992003699A1 (en) * | 1990-08-14 | 1992-03-05 | Autospect, Inc. | Machine vision surface characterization system |
| JPH04109263U (en) * | 1991-03-08 | 1992-09-22 | 日本精工株式会社 | sealing device |
| US5309222A (en) * | 1991-07-16 | 1994-05-03 | Mitsubishi Denki Kabushiki Kaisha | Surface undulation inspection apparatus |
| CN110044292A (en) * | 2018-01-16 | 2019-07-23 | 郑州宇通客车股份有限公司 | A kind of method for three-dimensional measurement and system based on line-structured light |
-
1979
- 1979-11-26 JP JP15317079A patent/JPS5676004A/en active Granted
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5833155A (en) * | 1981-08-22 | 1983-02-26 | Datsuku Eng Kk | Flaw inspector for recording magnetic tape |
| JPS60119404A (en) * | 1983-12-01 | 1985-06-26 | Nippon Sheet Glass Co Ltd | Inspecting device for distortion of plate glass |
| JPH0314122B2 (en) * | 1983-12-01 | 1991-02-26 | Nippon Sheet Glass Co Ltd | |
| WO1990006505A1 (en) * | 1988-11-28 | 1990-06-14 | Matsushita Electric Industrial Co., Ltd. | Method of and apparatus for detecting wrinkles in tapes |
| WO1992003699A1 (en) * | 1990-08-14 | 1992-03-05 | Autospect, Inc. | Machine vision surface characterization system |
| EP0543900A1 (en) * | 1990-08-14 | 1993-06-02 | Autospect Inc | Machine vision surface characterization system. |
| EP0543900B1 (en) * | 1990-08-14 | 1995-10-11 | Autospect, Inc. | Machine vision surface characterization system |
| JPH04109263U (en) * | 1991-03-08 | 1992-09-22 | 日本精工株式会社 | sealing device |
| US5309222A (en) * | 1991-07-16 | 1994-05-03 | Mitsubishi Denki Kabushiki Kaisha | Surface undulation inspection apparatus |
| CN110044292A (en) * | 2018-01-16 | 2019-07-23 | 郑州宇通客车股份有限公司 | A kind of method for three-dimensional measurement and system based on line-structured light |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0211085B2 (en) | 1990-03-12 |
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