JPS5520406A - Shape examination unit - Google Patents

Shape examination unit

Info

Publication number
JPS5520406A
JPS5520406A JP9250778A JP9250778A JPS5520406A JP S5520406 A JPS5520406 A JP S5520406A JP 9250778 A JP9250778 A JP 9250778A JP 9250778 A JP9250778 A JP 9250778A JP S5520406 A JPS5520406 A JP S5520406A
Authority
JP
Japan
Prior art keywords
light
reference value
converter
mirror
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9250778A
Other languages
Japanese (ja)
Inventor
Hidekazu Sekizawa
Masakata Minami
Yasuharu Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9250778A priority Critical patent/JPS5520406A/en
Publication of JPS5520406A publication Critical patent/JPS5520406A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To examine an edge form rapidly, accurately and easily by irradiating a coherent parallel light to a measured object an subjecting the reflection light to Fourier conversion and receiving prescribed higher light components of the converted light by a photoelectric converter and comparing obtained electric signals with a reference value.
CONSTITUTION: The laser light from laser light source 31 is made into a parallel light by collimator 32, and wafer 38 is scanned through half mirror 36 and lens 37 by scanning mirror 33. The reflection light from wafer 38 through resistor 39 is led to photoelectric converter array 42, which is placed on the focusing face, through Fourier conversion lens 37 and half mirror 36. The output signal is converted to a digital signal by A/D converter 44 and is led to computer 45 which controls the drive of driving mechanism 46 of mirror 33 and driving mechanism 41 of stage 40. The digital value obtained when a resistor having a regular edge angle is examined is peviously stored in a memory circuit as a reference value, and computer 45 compares the digital value, which is the output of A/D converter 44, with the reference value above and outputs an anomaly signal in case of their difference outside a prescribed range.
COPYRIGHT: (C)1980,JPO&Japio
JP9250778A 1978-07-31 1978-07-31 Shape examination unit Pending JPS5520406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9250778A JPS5520406A (en) 1978-07-31 1978-07-31 Shape examination unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9250778A JPS5520406A (en) 1978-07-31 1978-07-31 Shape examination unit

Publications (1)

Publication Number Publication Date
JPS5520406A true JPS5520406A (en) 1980-02-13

Family

ID=14056216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9250778A Pending JPS5520406A (en) 1978-07-31 1978-07-31 Shape examination unit

Country Status (1)

Country Link
JP (1) JPS5520406A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0488653A (en) * 1990-07-31 1992-03-23 Nec Corp Semiconductor element positioning device
US6266137B1 (en) 1998-04-10 2001-07-24 Nec Corporation Particle detecting apparatus using two light beams

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0488653A (en) * 1990-07-31 1992-03-23 Nec Corp Semiconductor element positioning device
US6266137B1 (en) 1998-04-10 2001-07-24 Nec Corporation Particle detecting apparatus using two light beams

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