JPS5744111A - Automatic focus adjusting method - Google Patents

Automatic focus adjusting method

Info

Publication number
JPS5744111A
JPS5744111A JP11935480A JP11935480A JPS5744111A JP S5744111 A JPS5744111 A JP S5744111A JP 11935480 A JP11935480 A JP 11935480A JP 11935480 A JP11935480 A JP 11935480A JP S5744111 A JPS5744111 A JP S5744111A
Authority
JP
Japan
Prior art keywords
pattern
focus detection
stage
electric signal
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11935480A
Other languages
Japanese (ja)
Inventor
Shogo Matsui
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11935480A priority Critical patent/JPS5744111A/en
Publication of JPS5744111A publication Critical patent/JPS5744111A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE:To make accurate focus adjustment while improving focus detection sensitivity by scanning a light beam on a focus detection pattern through the objective of a microscope and by converting the contrast of the observed pattern into an electric signal. CONSTITUTION:On a focus detection pattern 4 formed on the detected mirror surface of a mask base plate 1 mounted on a stage 6,a laser beam 8 reflected by a rotating mirror 8 is scanned through an objective lens 9, and the beam 8 transmitted in an area including the pattern 4 is supplied to a photoelectric converting element 14 through an optical lens 13 to be converted into an electric signal. Then, this signal is converted into a wave-height signal by a differentiating circuit 15 to detect whether the crest value increases or decreases according to the movement of the stage 6 by an electric signal processor 16. Then, a signal output system 17 controls a DC motor 5 to move the stage 6 up and down, and it is stopped where the greatest crest value is obtained, namely, where the highest contrast of the pattern 4 is obtained. Consequently, the focus detection sensitivity is improved and focus adjustment is made accurately.
JP11935480A 1980-08-29 1980-08-29 Automatic focus adjusting method Pending JPS5744111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11935480A JPS5744111A (en) 1980-08-29 1980-08-29 Automatic focus adjusting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11935480A JPS5744111A (en) 1980-08-29 1980-08-29 Automatic focus adjusting method

Publications (1)

Publication Number Publication Date
JPS5744111A true JPS5744111A (en) 1982-03-12

Family

ID=14759408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11935480A Pending JPS5744111A (en) 1980-08-29 1980-08-29 Automatic focus adjusting method

Country Status (1)

Country Link
JP (1) JPS5744111A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59163283U (en) * 1983-04-15 1984-11-01 積水化学工業株式会社 synthetic resin pipe
EP0323850A2 (en) * 1988-01-06 1989-07-12 Canon Kabushiki Kaisha A scanning optical apparatus
JPH03194673A (en) * 1989-12-22 1991-08-26 Sumitomo Electric Ind Ltd Code reader

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521316U (en) * 1975-06-20 1977-01-07
JPS5331151A (en) * 1976-09-03 1978-03-24 Hitachi Ltd Automatic focusing device for microscope
JPS53102052A (en) * 1977-02-18 1978-09-06 Hitachi Ltd Automatic focus adjuster

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521316U (en) * 1975-06-20 1977-01-07
JPS5331151A (en) * 1976-09-03 1978-03-24 Hitachi Ltd Automatic focusing device for microscope
JPS53102052A (en) * 1977-02-18 1978-09-06 Hitachi Ltd Automatic focus adjuster

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59163283U (en) * 1983-04-15 1984-11-01 積水化学工業株式会社 synthetic resin pipe
EP0323850A2 (en) * 1988-01-06 1989-07-12 Canon Kabushiki Kaisha A scanning optical apparatus
US5122658A (en) * 1988-01-06 1992-06-16 Canon Kabushiki Kaisha Scanning optical apparatus having focus position adjusting means
JPH03194673A (en) * 1989-12-22 1991-08-26 Sumitomo Electric Ind Ltd Code reader

Similar Documents

Publication Publication Date Title
JPS5780546A (en) Detecting device for foreign substance
DE3270640D1 (en) Off-axis light beam defect detector
JPS5744111A (en) Automatic focus adjusting method
JPS6412216A (en) Detection of position
JPS6439543A (en) Defective inspection device
JPS57212406A (en) Method and device for focusing
JPS5616806A (en) Surface roughness measuring unit
JPS53149043A (en) Optical scanning for laser beam scanner
GB2066014A (en) >Focus indicator
JPS5459166A (en) Visual sensibility measuring apparatus of interferometer
JPS57135343A (en) Surface defect inspecting device
JPS5764488A (en) Laser working device
JPS5720929A (en) Optical information reader
JPS5544926A (en) Article surface fault detector
JPS6488302A (en) Position detecting device
JPS5752807A (en) Device for measuring film thickness
JPS56603A (en) Position detecting unit
JPS5720603A (en) Detector for plate width using laser
JPS5756704A (en) Detector for surface flaw of bloom
JPS5536730A (en) Displaced position detector
SU1518671A1 (en) Method of monitoring roughness of surface
JPH01233078A (en) Pattern profiling type laser engraving method
JPS56125605A (en) Method and apparatus for detection of shape of striplike body
JPS6418593A (en) Aligining device for laser beam applied device
JPS56155803A (en) Shape detector