JPS6418593A - Aligining device for laser beam applied device - Google Patents

Aligining device for laser beam applied device

Info

Publication number
JPS6418593A
JPS6418593A JP62173802A JP17380287A JPS6418593A JP S6418593 A JPS6418593 A JP S6418593A JP 62173802 A JP62173802 A JP 62173802A JP 17380287 A JP17380287 A JP 17380287A JP S6418593 A JPS6418593 A JP S6418593A
Authority
JP
Japan
Prior art keywords
base plate
laser beam
spot
rectangular
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62173802A
Other languages
Japanese (ja)
Inventor
Toshikazu Kajikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62173802A priority Critical patent/JPS6418593A/en
Publication of JPS6418593A publication Critical patent/JPS6418593A/en
Pending legal-status Critical Current

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  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To improve the alignment accuracy by forming an opening image of a variable slit on a base plate to make it to a rectangular spot and deforming its shape to the optimum shape according to the scanning direction to obtain the high signal intensity and the sharp signal change. CONSTITUTION:The opening image of the variable slit 13 projected by a laser beam emitted from a beam expander 11 generated with a laser light source 10 is formed on the objective base plate 18 having a positioning mark as the rectangular laser beam spot by a half mirror 14, a total reflection mirror 12 and an objective lens 17. A signal beam reflected from the surface of the base plate 18 is detected by a signal beam detector 15 through the objective lens 17 and the half mirror 14. An XY stage 19 is used to scan the rectangular spot with respect to the base plate 18. A shape of the rectangular spot is deformed to a rectangle according to the scanning direction. The relation between coordinates of the XY stage and the detector output is obtained by the scanning and from this, the edge or center of a mark can be calculated by the electric or software processing.
JP62173802A 1987-07-14 1987-07-14 Aligining device for laser beam applied device Pending JPS6418593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62173802A JPS6418593A (en) 1987-07-14 1987-07-14 Aligining device for laser beam applied device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62173802A JPS6418593A (en) 1987-07-14 1987-07-14 Aligining device for laser beam applied device

Publications (1)

Publication Number Publication Date
JPS6418593A true JPS6418593A (en) 1989-01-23

Family

ID=15967429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62173802A Pending JPS6418593A (en) 1987-07-14 1987-07-14 Aligining device for laser beam applied device

Country Status (1)

Country Link
JP (1) JPS6418593A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03237738A (en) * 1990-02-14 1991-10-23 Matsushita Electron Corp Method and apparatus for analyzing semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03237738A (en) * 1990-02-14 1991-10-23 Matsushita Electron Corp Method and apparatus for analyzing semiconductor device

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