JPS6483390A - Laser beam machine - Google Patents
Laser beam machineInfo
- Publication number
- JPS6483390A JPS6483390A JP62239563A JP23956387A JPS6483390A JP S6483390 A JPS6483390 A JP S6483390A JP 62239563 A JP62239563 A JP 62239563A JP 23956387 A JP23956387 A JP 23956387A JP S6483390 A JPS6483390 A JP S6483390A
- Authority
- JP
- Japan
- Prior art keywords
- working
- laser light
- fuse
- worked
- recognition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To increase a reliability by operating the laser light for working and that for recognizing, detecting the reflection light emitted from the fuse to be worked of the laser light for recognition and deciding the good and no good of the fuse working based on the variation in the intensity of the reflection light before and after working. CONSTITUTION:The laser light 13 for working outputted from the laser oscillator 2 for working is reflected by a half mirror 4 via an attenuator 3 and projected on the wafer 1 to be worked by an objective lens 5. A fuse is cut with its exothermic sablimation by the laser light 13 image-formed on the fuse to be cut of the wafer 1 positioned by a stage driver 7. The laser light 14 for recognition of low power outputted from the laser oscillator 9 for recognition passes the same optical axis as that of the laser light for working and is made incident on a detector 12 after reflecting on the surface of the fuse to be worked. The intensity of the reflection light is measured by the detector 12 and in case of the cutting being found incomplete the position adjustment and reworking are commanded again to a controller 8. The semiconductor device having a high reliability can thus be manufactured.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62239563A JPS6483390A (en) | 1987-09-24 | 1987-09-24 | Laser beam machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62239563A JPS6483390A (en) | 1987-09-24 | 1987-09-24 | Laser beam machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6483390A true JPS6483390A (en) | 1989-03-29 |
Family
ID=17046661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62239563A Pending JPS6483390A (en) | 1987-09-24 | 1987-09-24 | Laser beam machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6483390A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03193284A (en) * | 1989-12-22 | 1991-08-23 | Advantest Corp | Laser cutting deciding method |
JPH0563222A (en) * | 1991-09-03 | 1993-03-12 | Sanyo Electric Co Ltd | Manufacturing equipment of photovoltaic apparatus |
US5763853A (en) * | 1994-04-20 | 1998-06-09 | Hitachi Construction Machinery Co., Ltd. | Laser processing apparatus, laser processing method and dam bar processing method |
JP2007309710A (en) * | 2006-05-17 | 2007-11-29 | Enshu Ltd | Microperiodic groove observation method and observation device thereof, microperiodic groove machining observation method and machining observation device thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57137089A (en) * | 1981-02-17 | 1982-08-24 | Toshiba Corp | Control method for welding state |
JPS61286081A (en) * | 1985-06-13 | 1986-12-16 | Toshiba Corp | Laser welding method |
-
1987
- 1987-09-24 JP JP62239563A patent/JPS6483390A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57137089A (en) * | 1981-02-17 | 1982-08-24 | Toshiba Corp | Control method for welding state |
JPS61286081A (en) * | 1985-06-13 | 1986-12-16 | Toshiba Corp | Laser welding method |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03193284A (en) * | 1989-12-22 | 1991-08-23 | Advantest Corp | Laser cutting deciding method |
JPH0563222A (en) * | 1991-09-03 | 1993-03-12 | Sanyo Electric Co Ltd | Manufacturing equipment of photovoltaic apparatus |
US5763853A (en) * | 1994-04-20 | 1998-06-09 | Hitachi Construction Machinery Co., Ltd. | Laser processing apparatus, laser processing method and dam bar processing method |
JP2007309710A (en) * | 2006-05-17 | 2007-11-29 | Enshu Ltd | Microperiodic groove observation method and observation device thereof, microperiodic groove machining observation method and machining observation device thereof |
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