JPS5331151A - Automatic focusing device for microscope - Google Patents

Automatic focusing device for microscope

Info

Publication number
JPS5331151A
JPS5331151A JP10504676A JP10504676A JPS5331151A JP S5331151 A JPS5331151 A JP S5331151A JP 10504676 A JP10504676 A JP 10504676A JP 10504676 A JP10504676 A JP 10504676A JP S5331151 A JPS5331151 A JP S5331151A
Authority
JP
Japan
Prior art keywords
microscope
automatic focusing
differentiation
pickup
overlap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10504676A
Other languages
Japanese (ja)
Other versions
JPS5715363B2 (en
Inventor
Hiroshi Makihira
Yasuo Nakagawa
Yukio Kenbo
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10504676A priority Critical patent/JPS5715363B2/ja
Publication of JPS5331151A publication Critical patent/JPS5331151A/en
Publication of JPS5715363B2 publication Critical patent/JPS5715363B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/241Devices for focusing
    • G02B21/244Devices for focusing using image analysis techniques

Abstract

PURPOSE:To give a differentiation to the video signal such as a pickup element provided on the real image surface and to overlap the signals. Thus,S/U is improved as well as the focusing accuracy can be increased.
JP10504676A 1976-09-03 1976-09-03 Expired JPS5715363B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10504676A JPS5715363B2 (en) 1976-09-03 1976-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10504676A JPS5715363B2 (en) 1976-09-03 1976-09-03

Publications (2)

Publication Number Publication Date
JPS5331151A true JPS5331151A (en) 1978-03-24
JPS5715363B2 JPS5715363B2 (en) 1982-03-30

Family

ID=14397048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10504676A Expired JPS5715363B2 (en) 1976-09-03 1976-09-03

Country Status (1)

Country Link
JP (1) JPS5715363B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744111A (en) * 1980-08-29 1982-03-12 Fujitsu Ltd Automatic focus adjusting method
JPS5778008A (en) * 1980-11-04 1982-05-15 Hitachi Ltd Method and device for controlling automatic forcusing
JPS60102736A (en) * 1983-11-10 1985-06-06 Hitachi Electronics Eng Co Ltd Automatic focussing mechanism for wafer
JPS6199113A (en) * 1984-10-22 1986-05-17 Toho Denshi Kogyo Kk Focusing method of microscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496938A (en) * 1972-03-17 1974-01-22
JPS502533A (en) * 1973-05-04 1975-01-11

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496938A (en) * 1972-03-17 1974-01-22
JPS502533A (en) * 1973-05-04 1975-01-11

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744111A (en) * 1980-08-29 1982-03-12 Fujitsu Ltd Automatic focus adjusting method
JPS5778008A (en) * 1980-11-04 1982-05-15 Hitachi Ltd Method and device for controlling automatic forcusing
JPS60102736A (en) * 1983-11-10 1985-06-06 Hitachi Electronics Eng Co Ltd Automatic focussing mechanism for wafer
JPS6199113A (en) * 1984-10-22 1986-05-17 Toho Denshi Kogyo Kk Focusing method of microscope

Also Published As

Publication number Publication date
JPS5715363B2 (en) 1982-03-30

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