JPS5715363B2 - - Google Patents

Info

Publication number
JPS5715363B2
JPS5715363B2 JP10504676A JP10504676A JPS5715363B2 JP S5715363 B2 JPS5715363 B2 JP S5715363B2 JP 10504676 A JP10504676 A JP 10504676A JP 10504676 A JP10504676 A JP 10504676A JP S5715363 B2 JPS5715363 B2 JP S5715363B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10504676A
Other languages
Japanese (ja)
Other versions
JPS5331151A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10504676A priority Critical patent/JPS5331151A/en
Publication of JPS5331151A publication Critical patent/JPS5331151A/en
Publication of JPS5715363B2 publication Critical patent/JPS5715363B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/244—Devices for focusing using image analysis techniques
JP10504676A 1976-09-03 1976-09-03 Automatic focusing device for microscope Granted JPS5331151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10504676A JPS5331151A (en) 1976-09-03 1976-09-03 Automatic focusing device for microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10504676A JPS5331151A (en) 1976-09-03 1976-09-03 Automatic focusing device for microscope

Publications (2)

Publication Number Publication Date
JPS5331151A JPS5331151A (en) 1978-03-24
JPS5715363B2 true JPS5715363B2 (en) 1982-03-30

Family

ID=14397048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10504676A Granted JPS5331151A (en) 1976-09-03 1976-09-03 Automatic focusing device for microscope

Country Status (1)

Country Link
JP (1) JPS5331151A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744111A (en) * 1980-08-29 1982-03-12 Fujitsu Ltd Automatic focus adjusting method
JPS5778008A (en) * 1980-11-04 1982-05-15 Hitachi Ltd Method and device for controlling automatic forcusing
JPS60102736A (en) * 1983-11-10 1985-06-06 Hitachi Electronics Eng Co Ltd Automatic focussing mechanism for wafer
JPS6199113A (en) * 1984-10-22 1986-05-17 Toho Denshi Kogyo Kk Focusing method of microscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496938A (en) * 1972-03-17 1974-01-22
JPS502533A (en) * 1973-05-04 1975-01-11

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496938A (en) * 1972-03-17 1974-01-22
JPS502533A (en) * 1973-05-04 1975-01-11

Also Published As

Publication number Publication date
JPS5331151A (en) 1978-03-24

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