JPS5778008A - Method and device for controlling automatic forcusing - Google Patents

Method and device for controlling automatic forcusing

Info

Publication number
JPS5778008A
JPS5778008A JP15374280A JP15374280A JPS5778008A JP S5778008 A JPS5778008 A JP S5778008A JP 15374280 A JP15374280 A JP 15374280A JP 15374280 A JP15374280 A JP 15374280A JP S5778008 A JPS5778008 A JP S5778008A
Authority
JP
Japan
Prior art keywords
circuit
signal
focusing
control
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15374280A
Other languages
Japanese (ja)
Inventor
Yoshisada Oshida
Hiroshi Makihira
Tadashi Honma
Tooru Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15374280A priority Critical patent/JPS5778008A/en
Publication of JPS5778008A publication Critical patent/JPS5778008A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE:To control automatic focusing irrespectively of the optical characteristics of objects to be measured, by driving the automatic focusing control of a surface roughness measuring device by normalizing contrast signals obtained when a striped pattern composed of periodical bright and dark zones is projected on the measuring object. CONSTITUTION:A minute pattern 103 is composed of bright and dark zones which are arranged alternately at prescribed intervals. The pattern 103 is irradiated by a white light source 102 and projected on the surface of an object 13 to be measured. lights reflected by the object 13 again pass through an objective lens 12 and form images at an array sensor 105. The image formed at the sensor 105 is transformed into electric signals. Outputs in the direction (y) S1-S16 are time-serially obtained synchronously to the scanning in the direction (x), and the outputs S1-S16 are added 113 to each other, and then, a contrast signal In is generated 119 through an absolute value circuit 115 and a delay circuit 117. Then, subtractions are performed on the contrast signal In by the output of an average strength calculating circuit 120, and a normalized signal IN is generated 121. Focusing conditions are obtained by performing hill-climbing control, by moving the measuring object 13 against the lens 12 from a focusing control circuit 123 through a focusing control mechanism driving circuit 125 by using the signal IN.
JP15374280A 1980-11-04 1980-11-04 Method and device for controlling automatic forcusing Pending JPS5778008A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15374280A JPS5778008A (en) 1980-11-04 1980-11-04 Method and device for controlling automatic forcusing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15374280A JPS5778008A (en) 1980-11-04 1980-11-04 Method and device for controlling automatic forcusing

Publications (1)

Publication Number Publication Date
JPS5778008A true JPS5778008A (en) 1982-05-15

Family

ID=15569110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15374280A Pending JPS5778008A (en) 1980-11-04 1980-11-04 Method and device for controlling automatic forcusing

Country Status (1)

Country Link
JP (1) JPS5778008A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS614011A (en) * 1984-06-18 1986-01-09 Canon Inc Automatic tracking device of camera
JPS6457557A (en) * 1987-08-28 1989-03-03 Hitachi Ltd Electron microscope
JP2007108455A (en) * 2005-10-14 2007-04-26 Fujifilm Corp Automatic focusing controller and control method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331151A (en) * 1976-09-03 1978-03-24 Hitachi Ltd Automatic focusing device for microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331151A (en) * 1976-09-03 1978-03-24 Hitachi Ltd Automatic focusing device for microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS614011A (en) * 1984-06-18 1986-01-09 Canon Inc Automatic tracking device of camera
JPS6457557A (en) * 1987-08-28 1989-03-03 Hitachi Ltd Electron microscope
JP2007108455A (en) * 2005-10-14 2007-04-26 Fujifilm Corp Automatic focusing controller and control method

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