JPS5714813A - Focus measuring device - Google Patents

Focus measuring device

Info

Publication number
JPS5714813A
JPS5714813A JP8942980A JP8942980A JPS5714813A JP S5714813 A JPS5714813 A JP S5714813A JP 8942980 A JP8942980 A JP 8942980A JP 8942980 A JP8942980 A JP 8942980A JP S5714813 A JPS5714813 A JP S5714813A
Authority
JP
Japan
Prior art keywords
stage
lens system
camera
deltah
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8942980A
Other languages
Japanese (ja)
Inventor
Toshio Konishi
Morio Misonoo
Tetsuzo Kuragano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP8942980A priority Critical patent/JPS5714813A/en
Publication of JPS5714813A publication Critical patent/JPS5714813A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/244—Devices for focusing using image analysis techniques

Abstract

PURPOSE:To perform focusing automatically by picking up the image of an object to be measured, converting the same to a luminance signal then to a differentiated signal and detecting the point where the magnitude of the signal comes to a maximal value. CONSTITUTION:A microscope 10, a lens system 11, and a stage 12 are provided. An object 19 to be measured is placed on the stage 12, and is lighted by a light source 13. The stage 12 is so arranged with, for example, a step motor 14, that the stage 12 can be moved upward or downward stepwise by each DELTAh in the direction of the lens system 1. The extent DELTAh of this movement is made sufficiently small as compared to the focal depth of the lens system 11. A television camera 21 is coupled to the lens system 11 so that a wafer 19 is taken by the camera. Horizontal and vertical synchronizing pulses are formed by a control signal forming circuit 100, and the pulses thereof are supplied to the camera 21, whereby horizontal and vertical deflection is carried out.
JP8942980A 1980-06-30 1980-06-30 Focus measuring device Pending JPS5714813A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8942980A JPS5714813A (en) 1980-06-30 1980-06-30 Focus measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8942980A JPS5714813A (en) 1980-06-30 1980-06-30 Focus measuring device

Publications (1)

Publication Number Publication Date
JPS5714813A true JPS5714813A (en) 1982-01-26

Family

ID=13970407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8942980A Pending JPS5714813A (en) 1980-06-30 1980-06-30 Focus measuring device

Country Status (1)

Country Link
JP (1) JPS5714813A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53100845A (en) * 1977-02-16 1978-09-02 Hitachi Ltd Automatic focusing system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53100845A (en) * 1977-02-16 1978-09-02 Hitachi Ltd Automatic focusing system

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