JPS54119949A - Device for measuring thickness - Google Patents

Device for measuring thickness

Info

Publication number
JPS54119949A
JPS54119949A JP2665778A JP2665778A JPS54119949A JP S54119949 A JPS54119949 A JP S54119949A JP 2665778 A JP2665778 A JP 2665778A JP 2665778 A JP2665778 A JP 2665778A JP S54119949 A JPS54119949 A JP S54119949A
Authority
JP
Japan
Prior art keywords
light
fourier
thickness
resist
zero
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2665778A
Other languages
Japanese (ja)
Other versions
JPS5813842B2 (en
Inventor
Hidekazu Sekizawa
Masakata Minami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2665778A priority Critical patent/JPS5813842B2/en
Publication of JPS54119949A publication Critical patent/JPS54119949A/en
Publication of JPS5813842B2 publication Critical patent/JPS5813842B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To automatically measure the thickness (about 1μm) of a rugged piece quickly, accurately and easily, by irradiating a parallel laser beam of diameter smaller than the spacing of recesses or projections of the rugged piece and converting the intensity of the zero-order component of the reflected laser beam into electricity.
CONSTITUTION: Light from a laser source 51 is processed by a collimator 52 to parallel rays of predetermined diameter, which proceed to a scanning mirror 53. Scanning is effected in the direction X by the mirror 53 so that the light is transmitted to a Fourier transformation lens 57 which Fourier-transforms the light to a thin parallel beam. This beam is irradiated on a measured wafer 58. The light reflected by the wafer 58 and a resist 59 is conducted to a photoelectric converter 61 through the Fourier transformation lens 57. The intensity of the zero-order component of the light Fourier-transformed at the second time is converted into an electric signal, whose maximum and minimum values are detected by a microcomputer 63 to calculate the mean value of the thickness of the resist 59.
COPYRIGHT: (C)1979,JPO&Japio
JP2665778A 1978-03-10 1978-03-10 thickness measuring device Expired JPS5813842B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2665778A JPS5813842B2 (en) 1978-03-10 1978-03-10 thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2665778A JPS5813842B2 (en) 1978-03-10 1978-03-10 thickness measuring device

Publications (2)

Publication Number Publication Date
JPS54119949A true JPS54119949A (en) 1979-09-18
JPS5813842B2 JPS5813842B2 (en) 1983-03-16

Family

ID=12199488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2665778A Expired JPS5813842B2 (en) 1978-03-10 1978-03-10 thickness measuring device

Country Status (1)

Country Link
JP (1) JPS5813842B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3335928A1 (en) * 1983-10-04 1985-04-18 L. Schuler GmbH, 7320 Göppingen DEVICE FOR FEEDING SHEET CUTS TO THE LEVEL OF A MULTI-STAGE PRESS

Also Published As

Publication number Publication date
JPS5813842B2 (en) 1983-03-16

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