JPS54119949A - Device for measuring thickness - Google Patents
Device for measuring thicknessInfo
- Publication number
- JPS54119949A JPS54119949A JP2665778A JP2665778A JPS54119949A JP S54119949 A JPS54119949 A JP S54119949A JP 2665778 A JP2665778 A JP 2665778A JP 2665778 A JP2665778 A JP 2665778A JP S54119949 A JPS54119949 A JP S54119949A
- Authority
- JP
- Japan
- Prior art keywords
- light
- fourier
- thickness
- resist
- zero
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To automatically measure the thickness (about 1μm) of a rugged piece quickly, accurately and easily, by irradiating a parallel laser beam of diameter smaller than the spacing of recesses or projections of the rugged piece and converting the intensity of the zero-order component of the reflected laser beam into electricity.
CONSTITUTION: Light from a laser source 51 is processed by a collimator 52 to parallel rays of predetermined diameter, which proceed to a scanning mirror 53. Scanning is effected in the direction X by the mirror 53 so that the light is transmitted to a Fourier transformation lens 57 which Fourier-transforms the light to a thin parallel beam. This beam is irradiated on a measured wafer 58. The light reflected by the wafer 58 and a resist 59 is conducted to a photoelectric converter 61 through the Fourier transformation lens 57. The intensity of the zero-order component of the light Fourier-transformed at the second time is converted into an electric signal, whose maximum and minimum values are detected by a microcomputer 63 to calculate the mean value of the thickness of the resist 59.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2665778A JPS5813842B2 (en) | 1978-03-10 | 1978-03-10 | thickness measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2665778A JPS5813842B2 (en) | 1978-03-10 | 1978-03-10 | thickness measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54119949A true JPS54119949A (en) | 1979-09-18 |
JPS5813842B2 JPS5813842B2 (en) | 1983-03-16 |
Family
ID=12199488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2665778A Expired JPS5813842B2 (en) | 1978-03-10 | 1978-03-10 | thickness measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5813842B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3335928A1 (en) * | 1983-10-04 | 1985-04-18 | L. Schuler GmbH, 7320 Göppingen | DEVICE FOR FEEDING SHEET CUTS TO THE LEVEL OF A MULTI-STAGE PRESS |
-
1978
- 1978-03-10 JP JP2665778A patent/JPS5813842B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5813842B2 (en) | 1983-03-16 |
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