JPS5526458A - Spot size measuring system of laser beam - Google Patents
Spot size measuring system of laser beamInfo
- Publication number
- JPS5526458A JPS5526458A JP9951478A JP9951478A JPS5526458A JP S5526458 A JPS5526458 A JP S5526458A JP 9951478 A JP9951478 A JP 9951478A JP 9951478 A JP9951478 A JP 9951478A JP S5526458 A JPS5526458 A JP S5526458A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- output
- spot size
- knife edge
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To measure a spot size rapidly with a high precision even if the spot size and the output are changed always, by subjecting the output, which is obtained by laser beam scanning, to a prescribed operation processing after digitizing and storing the output temporarily.
CONSTITUTION: Knife edge 2 of chopper 3 is arranged on the light path of laser beam 1; and when beam 1 is scanned, the quantity of beam 1 inputted to detector 5 is changed due to the position of knife edge 2. Then, the scanning output waveform from detector 5 is converted to a proper number of digital sampling data by sample gate 6 and is stored temporarily in waveform storage device 7, and after that, the laser beam radius is calculated rapidly from the beam intensity corresponding to the position of knife edge 2 and is displayed on display unit 9.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9951478A JPS5526458A (en) | 1978-08-17 | 1978-08-17 | Spot size measuring system of laser beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9951478A JPS5526458A (en) | 1978-08-17 | 1978-08-17 | Spot size measuring system of laser beam |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5526458A true JPS5526458A (en) | 1980-02-25 |
Family
ID=14249352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9951478A Pending JPS5526458A (en) | 1978-08-17 | 1978-08-17 | Spot size measuring system of laser beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5526458A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4917489A (en) * | 1988-05-19 | 1990-04-17 | Pioneer Electronic Corporation | Device for measuring size of light spot |
US5499094A (en) * | 1994-12-21 | 1996-03-12 | Eastman Kodak Company | Apparatus and method for measuring the length and width of a spot of light utilizing two different masks |
CN102564331A (en) * | 2011-08-02 | 2012-07-11 | 北京国科世纪激光技术有限公司 | Structure for measuring high-power laser spots |
-
1978
- 1978-08-17 JP JP9951478A patent/JPS5526458A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4917489A (en) * | 1988-05-19 | 1990-04-17 | Pioneer Electronic Corporation | Device for measuring size of light spot |
US5499094A (en) * | 1994-12-21 | 1996-03-12 | Eastman Kodak Company | Apparatus and method for measuring the length and width of a spot of light utilizing two different masks |
CN102564331A (en) * | 2011-08-02 | 2012-07-11 | 北京国科世纪激光技术有限公司 | Structure for measuring high-power laser spots |
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