JPS5526458A - Spot size measuring system of laser beam - Google Patents

Spot size measuring system of laser beam

Info

Publication number
JPS5526458A
JPS5526458A JP9951478A JP9951478A JPS5526458A JP S5526458 A JPS5526458 A JP S5526458A JP 9951478 A JP9951478 A JP 9951478A JP 9951478 A JP9951478 A JP 9951478A JP S5526458 A JPS5526458 A JP S5526458A
Authority
JP
Japan
Prior art keywords
laser beam
output
spot size
knife edge
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9951478A
Other languages
Japanese (ja)
Inventor
Hiroyuki Fujita
Yasuji Suzaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9951478A priority Critical patent/JPS5526458A/en
Publication of JPS5526458A publication Critical patent/JPS5526458A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure a spot size rapidly with a high precision even if the spot size and the output are changed always, by subjecting the output, which is obtained by laser beam scanning, to a prescribed operation processing after digitizing and storing the output temporarily.
CONSTITUTION: Knife edge 2 of chopper 3 is arranged on the light path of laser beam 1; and when beam 1 is scanned, the quantity of beam 1 inputted to detector 5 is changed due to the position of knife edge 2. Then, the scanning output waveform from detector 5 is converted to a proper number of digital sampling data by sample gate 6 and is stored temporarily in waveform storage device 7, and after that, the laser beam radius is calculated rapidly from the beam intensity corresponding to the position of knife edge 2 and is displayed on display unit 9.
COPYRIGHT: (C)1980,JPO&Japio
JP9951478A 1978-08-17 1978-08-17 Spot size measuring system of laser beam Pending JPS5526458A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9951478A JPS5526458A (en) 1978-08-17 1978-08-17 Spot size measuring system of laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9951478A JPS5526458A (en) 1978-08-17 1978-08-17 Spot size measuring system of laser beam

Publications (1)

Publication Number Publication Date
JPS5526458A true JPS5526458A (en) 1980-02-25

Family

ID=14249352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9951478A Pending JPS5526458A (en) 1978-08-17 1978-08-17 Spot size measuring system of laser beam

Country Status (1)

Country Link
JP (1) JPS5526458A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4917489A (en) * 1988-05-19 1990-04-17 Pioneer Electronic Corporation Device for measuring size of light spot
US5499094A (en) * 1994-12-21 1996-03-12 Eastman Kodak Company Apparatus and method for measuring the length and width of a spot of light utilizing two different masks
CN102564331A (en) * 2011-08-02 2012-07-11 北京国科世纪激光技术有限公司 Structure for measuring high-power laser spots

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4917489A (en) * 1988-05-19 1990-04-17 Pioneer Electronic Corporation Device for measuring size of light spot
US5499094A (en) * 1994-12-21 1996-03-12 Eastman Kodak Company Apparatus and method for measuring the length and width of a spot of light utilizing two different masks
CN102564331A (en) * 2011-08-02 2012-07-11 北京国科世纪激光技术有限公司 Structure for measuring high-power laser spots

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