JPS5567603A - Pattern inspection method - Google Patents

Pattern inspection method

Info

Publication number
JPS5567603A
JPS5567603A JP14079178A JP14079178A JPS5567603A JP S5567603 A JPS5567603 A JP S5567603A JP 14079178 A JP14079178 A JP 14079178A JP 14079178 A JP14079178 A JP 14079178A JP S5567603 A JPS5567603 A JP S5567603A
Authority
JP
Japan
Prior art keywords
level
light
counter
pattern width
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14079178A
Other languages
Japanese (ja)
Inventor
Moritoshi Ando
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14079178A priority Critical patent/JPS5567603A/en
Publication of JPS5567603A publication Critical patent/JPS5567603A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable to measure the pattern width having a given frequency, by emitting a plurality of light spots different in the wave length on the board on which the pattern of shield light layer is formed and measuring the pattern width of the transmission light strength distribution shield material layer obtained at the photo detector.
CONSTITUTION: The laser light from the laser light sources 10W12 in wave length λ1Wλ2 is emitted on the printed board 1 via the half mirrors 13 and 14 and the reflection mirror 15. At a given region of scanning line, the light from the laser light sources 10W12 in shut with the conductive layer and can not transmit the printed board 1, causing the low (L) output level of the detectors 19W21. Accordingly, since the output level of the AND circuit 25 is at L level and the output of the OR circuit 26 is also at L level, the counter 27 performs count operation while the light spot scans the scanning region. In this case, since the output level of the exclusive logical sum circuit 29 is at level, the multiplier 30 directly outputs the count value of the counter. Thus, the pattern width can be obtained from the counter count value and the scanning speed.
COPYRIGHT: (C)1980,JPO&Japio
JP14079178A 1978-11-15 1978-11-15 Pattern inspection method Pending JPS5567603A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14079178A JPS5567603A (en) 1978-11-15 1978-11-15 Pattern inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14079178A JPS5567603A (en) 1978-11-15 1978-11-15 Pattern inspection method

Publications (1)

Publication Number Publication Date
JPS5567603A true JPS5567603A (en) 1980-05-21

Family

ID=15276817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14079178A Pending JPS5567603A (en) 1978-11-15 1978-11-15 Pattern inspection method

Country Status (1)

Country Link
JP (1) JPS5567603A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59142406A (en) * 1983-01-28 1984-08-15 ウエスチングハウス　エレクトリツク　コ−ポレ−シヨン Position aligning detector using large number of optical channel
JPS63314402A (en) * 1987-06-18 1988-12-22 Fujitsu Ltd Inspection method for mask pattern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59142406A (en) * 1983-01-28 1984-08-15 ウエスチングハウス　エレクトリツク　コ−ポレ−シヨン Position aligning detector using large number of optical channel
JPS63314402A (en) * 1987-06-18 1988-12-22 Fujitsu Ltd Inspection method for mask pattern

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