JPS56141507A - Detector for metallic foil pattern in printed substrate - Google Patents

Detector for metallic foil pattern in printed substrate

Info

Publication number
JPS56141507A
JPS56141507A JP4527180A JP4527180A JPS56141507A JP S56141507 A JPS56141507 A JP S56141507A JP 4527180 A JP4527180 A JP 4527180A JP 4527180 A JP4527180 A JP 4527180A JP S56141507 A JPS56141507 A JP S56141507A
Authority
JP
Japan
Prior art keywords
pattern
light
printed substrate
reflected
transmitted light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4527180A
Other languages
Japanese (ja)
Other versions
JPS6310762B2 (en
Inventor
Moritoshi Ando
Katsumi Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4527180A priority Critical patent/JPS56141507A/en
Publication of JPS56141507A publication Critical patent/JPS56141507A/en
Publication of JPS6310762B2 publication Critical patent/JPS6310762B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To accomplish pattern detection accurately by such constitution that when the operation of a photometric device by the transmitted light of a printed substrate is insufficient a photometric device by reflected light is used. CONSTITUTION:A surface pattern 2-1 and back pattern 2-2 which are copper foils to be inspected are formed on a printed substrate 1. Light 4 emitted from a laser 3 is made into a condensed beam 8 by way of a half mirror 5, a scanning mirror 6, and a scanning lens 7, and the transmitted light thereof is detected in a transmitted quantity measuring device 9, whereby the length of the pattern of the copper foils is measured. On the other hand, the light reflected by the pattern 2-1 enters a reflection measuring device 10. Slice levels are provided to the device 9 and the device 10, and when the transmitted light input T is above the slice level, the pattern is measured by T. On the other hand, when T is below the level and the reflected input R is not detected, the measurement is changed over to that by R, and the pattern detection thereafter is accomplished by the R signal. Thereby, the accurate pattern detection is accomplished.
JP4527180A 1980-04-08 1980-04-08 Detector for metallic foil pattern in printed substrate Granted JPS56141507A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4527180A JPS56141507A (en) 1980-04-08 1980-04-08 Detector for metallic foil pattern in printed substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4527180A JPS56141507A (en) 1980-04-08 1980-04-08 Detector for metallic foil pattern in printed substrate

Publications (2)

Publication Number Publication Date
JPS56141507A true JPS56141507A (en) 1981-11-05
JPS6310762B2 JPS6310762B2 (en) 1988-03-09

Family

ID=12714642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4527180A Granted JPS56141507A (en) 1980-04-08 1980-04-08 Detector for metallic foil pattern in printed substrate

Country Status (1)

Country Link
JP (1) JPS56141507A (en)

Also Published As

Publication number Publication date
JPS6310762B2 (en) 1988-03-09

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