JPS5735704A - Surface state measuring method of metallic plate and its device - Google Patents

Surface state measuring method of metallic plate and its device

Info

Publication number
JPS5735704A
JPS5735704A JP11134580A JP11134580A JPS5735704A JP S5735704 A JPS5735704 A JP S5735704A JP 11134580 A JP11134580 A JP 11134580A JP 11134580 A JP11134580 A JP 11134580A JP S5735704 A JPS5735704 A JP S5735704A
Authority
JP
Japan
Prior art keywords
light beam
reflected
metallic plate
gamma
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11134580A
Other languages
Japanese (ja)
Inventor
Tsugio Ishida
Toru Inouchi
Taketomo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP11134580A priority Critical patent/JPS5735704A/en
Publication of JPS5735704A publication Critical patent/JPS5735704A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To measure a microscopic difference of a surface state, by making a mirror surface oppose dhe surface of a metallic plate, projecting a light beam aslant, and commparing a reflected ray which has been obtained by reflecting it plural times at different points of the metallic plate and the mirror surface, with the incident light beam. CONSTITUTION:A light beam I0 from a light source 3 is partially made incident to a sensor 5 by the half-mirror, and its residual is reflected by a sample 1, is made I1, and after it has been reflected (n) times repeatedly between a mirror surface 2 and the data 1, it is made In, and is made incident to a sensor 5'. Outputs of the sensors 5, 5' are inputted to an operation device 6, and its ratio is calculated. For instance, if a light beam is attenuated to gamma(1>gamma) whenever it is reflected once by the data 1, a light beam which has been reflected (n) times becomes gamma<n>. In this way, in case when a reflected light beam of once is compared with the reference surface, a microscopic variation whose detection is difficult is also detected and measured easily.
JP11134580A 1980-08-13 1980-08-13 Surface state measuring method of metallic plate and its device Pending JPS5735704A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11134580A JPS5735704A (en) 1980-08-13 1980-08-13 Surface state measuring method of metallic plate and its device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11134580A JPS5735704A (en) 1980-08-13 1980-08-13 Surface state measuring method of metallic plate and its device

Publications (1)

Publication Number Publication Date
JPS5735704A true JPS5735704A (en) 1982-02-26

Family

ID=14558831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11134580A Pending JPS5735704A (en) 1980-08-13 1980-08-13 Surface state measuring method of metallic plate and its device

Country Status (1)

Country Link
JP (1) JPS5735704A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0481649A2 (en) * 1990-10-17 1992-04-22 Pilkington Plc Apparatus for determining the surface topography of an article
JP2006226727A (en) * 2005-02-15 2006-08-31 Hamamatsu Photonics Kk Absorption measuring instrument
JP2014228366A (en) * 2013-05-22 2014-12-08 富士通株式会社 Inspection method and inspection device
JP2015169640A (en) * 2014-03-11 2015-09-28 協和界面科学株式会社 Observation optical device and contact angle meter

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5599045A (en) * 1979-01-24 1980-07-28 Japan Spectroscopic Co Surface reflection measuring apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5599045A (en) * 1979-01-24 1980-07-28 Japan Spectroscopic Co Surface reflection measuring apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0481649A2 (en) * 1990-10-17 1992-04-22 Pilkington Plc Apparatus for determining the surface topography of an article
JP2006226727A (en) * 2005-02-15 2006-08-31 Hamamatsu Photonics Kk Absorption measuring instrument
JP2014228366A (en) * 2013-05-22 2014-12-08 富士通株式会社 Inspection method and inspection device
JP2015169640A (en) * 2014-03-11 2015-09-28 協和界面科学株式会社 Observation optical device and contact angle meter

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